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Home » Semiconductor » Products » Measurement Method » Laser scattering method

Laser scattering method

Laser scattering method
PR-PD2HR Particle detection system

Reticle / Mask Particle Detection System, PR-PD2HR

Ultra sensitive detection down to 0.35 µm, suitable for detection of chrome, glass and pellicle surfaces

PR-PD5 Particle detection system

Reticle / Mask Particle Detection System, PR-PD5 - Compact, low cost reticle / mask particle detection system.

Compact, low operating cost, and wide ranging applications, suitable for detection of both glass, chrome and pellicle surfaces.

HORIBA's PR-PD2 Particle Detection System

Reticle/Mask Particle Detection System, PR-PD2

Ultra sensitive detection down to 0.35um. Efficiently provides particle detection with high throughput

PR-PD3 Particle Detection System image

Reticle/Mask Particle Detection System, PR-PD3

Wide Ranging Applications, Compact and Low Operating Cost

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