Optimize processes and increase cell supply stability and conversion efficiency and reduce waste through real-time monitoring of chemical solution concentrations.

HORIBA’s chemical solution concentration monitors support the optimization of solar cell manufacturing processes through real-time measurement of chemical solution concentrations in cleaning and etching processes. This enables greater accuracy in chemical-based texture formation and the removal of impurities, contributing dramatically to improved conversion efficiency in crystalline silicon solar cells.


Semiconductor wet process monitor, CS-100F1 Series image

在线多样监测!!

适用于使用批次式、单槽、单晶圆各方式的清洗装置。

The CS-100 Series monitors measure in real time the concentrations of various types of chemical solutions and have the capability to control the timing of automatic chemical spiking.

Hydrofluoric Acid Monitor CM-200A/210A

实时显示半导体制造工艺中的氢氟酸浓度

Indication Converter HF-960H

[新]

可用于测量高浓度氢氟酸、盐酸等

Low Concentration Type HF/HCl/NH3 Concentration Monitor

高精密测量出低浓度氢氟酸,盐酸和氨气

Converter HE-960HC

可用于在半导体和FPD制造过程中管理化学品和液体废物

industrial resistivity meter HE-480R

工业用比电阻计HE-480R是具有高精度温度补偿性能的比电阻计。

它最适合于连续监测在半导体领域以及电子・食品・医药品等各种领域的制造工艺中所使用的超纯水 。