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化学药液浓度计

Chemical Monitoring

HORIBA 化学药液浓度计用于半导体制程等高科技行业的关键清洗和蚀刻工艺。我们的浓度计实时测量各种化学药液的浓度,如 SC-1、SC-2、SPM、HF 等。

HORIBA 化学药液浓度计可以测量单个组分也可以同时测量多达八个组分(取决于产品型号)。HORIBA 在线和离线高性能制程浓度计保证与您的制程和设备匹配。

我们所有产品型号都要求低维护率,且相当稳定。这些产品可提供高精度和可重复性的制程检测,以改进先进制程并减少浪费。

 

HORIBA’s range of products for chemical  process control and wet process monitoring are used throughout the semiconductor manufacturing process and other high performance applications to improve process stability and reduce waste. 

Chemical Concentration Monitor

HORIBA’s chemical concentration monitors are used in critical cleaning and etching processes of high tech industries like the semiconductor manufacturing process. Our monitors measure the concentration of various chemical materials i.e. SC-1, SC-2, SPM, HF etc. in real-time.

HORIBA's chemical concentration monitors can measure single components as well as up to eight components simultaneously (depending on product model). HORIBA’s in line and offline high performance process monitors  ensure a perfect match to your manufacturing process and facilities.

All our models require low maintenance and are extremely robust. They offer highly accurate and repeatable process monitoring to improve your high value process and reduce waste.

In-line pH Monitors

pH is one of the most common parameters tested across a wide range of industries. HORIBA’s in-line pH monitors are used in the manufacturing process for various industries; including pharmaceuticals, food and beverage and agriculture.

Where there is a need to continuously measure pH, our high quality in-line pH monitors can help improve manufacturing quality and productivity by collecting and recording critical process data over time.


Ultra-Pure Water Monitor

Some manufacturing industries require a consistent and reliable source of purified or ultra-pure water. Examples of these are: Semiconductor, Pharmaceutical and Power Generation. Water is treated to remove impurities and conditioned depending on the application.

HORIBA offer a highly sensitive silica monitor for monitoring ultra-pure or purified water. This monitor is widely used in the cutting-edge semiconductor manufacturing process.

相关产品

CS-100 Series
CS-100 Series

独立式化学药液浓度计

CS-100F1 系列
CS-100F1 系列

光纤型化学药液浓度计

CS-600F
CS-600F

光纤型化学药液浓度计

CS-620F
CS-620F

光纤型高温磷酸浓度计

CS-700
CS-700

高精度、高稳定性化学药液浓度计

CS-900
CS-900

非接触式化学药液浓度计

HD-960L
HD-960L

低浓度溶解氧浓度计

HE-480C-GC
HE-480C-GC

碳传感器电导率计(低浓度型)

HE-480R(W)
HE-480R(W)

工业级电阻率计

HE-960CA
HE-960CA

柠檬酸浓度计

HE-960H-KOH
HE-960H-KOH

KOH 浓度计

HE-960H-TM
HE-960H-TM

宽测量范围 TMAH 浓度计

HE-960H-TM-S
HE-960H-TM-S

高精度 TMAH 浓度计

HE-960HC
HE-960HC

碳传感器电导率计(高浓度)

HE-960LC
HE-960LC

碳传感器电导率计

HE-960LF / FS-09F-1/2
HE-960LF / FS-09F-1/2

平面碳传感器电导率计

HE-960R-GC(W)
HE-960R-GC(W)

碳传感器电阻率计

HE-960RW-GC(W)
HE-960RW-GC(W)

双通道电阻率计

HF-960EM
HF-960EM

在线传感器和自动测量范围切换浓度计

HF-960H
HF-960H

HF / HCl 浓度计

HF-960M
HF-960M

低浓度型 HF/HCl/NH3 浓度计

HF-SP-CU
HF-SP-CU

双通道高精度 HF 浓度计

HP-480(W)
HP-480(W)

工业 级pH 计

HZ-960
HZ-960

溶解臭氧浓度计

HZ-960HPO-M
HZ-960HPO-M

H2O2 浓度计

SLIA-300
SLIA-300

高灵敏度二氧化硅浓度计

UP-100
UP-100

微量 pH 计

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