Fiber Optic Type Chemical Concentration Monitor CS-600F

Přehled

The CS-600F achieves a higher level of functionality best suited for manufacturing, such as the ability to perform in-line measurement of high temperature chemical solutions in various applications, stable operation for reduced downtime, and compact size for improved space productivity in order to meet the precise chemical solution concentration management required in leading-edge semiconductor wet process.

Funkce

  • Reduced Sizes for More Flexible Layout
    The CS-600F monitor is compact in size; height has been reduced by 36%, volume by 40%, and the space required by the cell cables by 46% compared to previous models (CS-100F1 series).
    The light source unit and monitor main body can be installed remotely and in separate locations, which allows installation flexibility based on the locations of chemical solution unit and cleaning equipment.
  • High-stability, In-line Measurement of High Temperature Chemical Solutions (20 to 80℃)
    The all-new optical system and improved processing algorithms enable in-line measurement of high temperature chemical solutions, a critical step for leading-edge wet processes. This eliminates the need to cool-down the chemical sample., HORIBA’s CS-600F provides a high-stability, enables more efficient and precise chemical solution management.
  • Significantly Reduced Background Correction Frequency
    The regular correction frequency is significantly reduced compared to the previous model (CS-100F1 Series), which in turn significantly reduces unit downtime and greatly contributes to improved throughput.
  • A Single Monitor is Capable of Measuring Up to Six Types of Chemical Solutions (solution types or ranges)
    A single monitor can measure up to six types of chemical solutions (solution types or ranges). Solution types and ranges can be freely specified, enabling the CS-600F to meet a wide variety of monitoring requirements.
  • Capable of Outputting Measured Values of Up to Six Components (Serial Output)
    The previous model (CS-100F1 Series) was able to output four components (serial output). This new model can output up to six components through the serial output. Analog output of new model is four components versus two on the previous model.

Vyrobeno HORIBA Advanced Techno

Specifikace

Model

CS-600F

Measurement
principle

Absorption spectroscopic method

Calculation
principle

Temperature compensation type multivariate analysis

Measurement target

NH3/H2O2/H2O (reperesentative specification)
* Please contact HORIBA regarding other chemicals.

Measurement range

NH3:0.00~1.20mass%、H2O2:0.00~5.50mass%、
H2O:93.3~100.0mass%

Repeatability

NH3:±0.05mass%、H2O2:±10mass%、H2O:±1.0mass%
Chemical temperature: Within ±1℃/1 hour

Sample solution
temperature

20〜80℃

Measurement cycle

Approx. 3 seconds

LCD
display

(1) Measured value (%)
(2) Concentration alarm (HH/H/L/LL)
(3) Error code (EXXX)
(4) Chemical temperature (°C)
(5) Serial/parallel communication status (P/S)
(6) The times of background correction failure (CXXX)

Key input

(1) Concentration alarm setting (HH/H/L/LL)
(2) Concentration value shift
(3) Background correction
(4) Hot water correction
(5) Temperature dependent concentration shift

Parallel
input

Input voltage of 12 V to 30 V DC by insulating with photo coupler
(1) Parallel concentration alarm output (On/Off)
(2) Switching chemical solution for measurement
(including background correction)
(3) Hot water correction

Parallel
output

Transistor output (NPN open collector) by insulating with photo coupler
Maximum current when powered ON: 5 mA DC (no internal protective resistance)
Maximum voltage when powered OFF: 30 V DC
(1) Concentration alarm (ON at HH/H/L/LL alarm)
(2) Monitor error (OFF at error)
(3) Measuring (ON at measurement)
(4) Chemical solution type for measurement
(5) Echo to hot water correction input
(6) Warning (ON at occurred)
(7) Background correction status 8) Hot water correction status

Serial input

RS-232C
(1) Request for readout of measurement data
(2) Select chemical solution type to be measured
(3) Hot water correction

Serial
output

RS-232C
(1) Measured data No.
(2) Chemical solution type
(3) Concentration value
(4) Error code
(5) Chemical temperature

Analog
output

4 mA to 20 mA
In case of monitor error occurs, measurement is stopped or
invalid chemical range is selected, the signal output is fixed at 1.5 mA. The load resistor must be 500 Ω maximum.

Chemical solution
temperature input

Terminal block inlet (terminal screw M3)
Platinum resistance temperature sensor: Pt100
(Three-conductor type, Class A) *Temperature sensor is not included.

Air
(for operation and purge)

Connection port: 4 mm O.D. quick joint,
Pressure: 0.2 MPa ±0.02 Mpa

Power source

100~230V AC(Single-Phase)、50/60Hz

Power consumption

Approx. 85 VA
(transient electric current at the time of the start is excluded)

Weight

(Monitor) Approx. 3.6 kg
(Lamp unit) Approx. 2.8 kg
(Sample cell) Approx. 1.2 kg

Ambient temperature

(Monitor, Lamp unit) 20°C to 30°C
(Sample cell, Optical fiber) 20°C to 35°C
(Sudden temperature change should be avoided, within ±1°C/1 hour)

Ambient humidity

(Monitor, Lamp unit, Sample cell) 40% to 70%
(Should be no dew condensation)

Slanting angle at installation

(Monitor, Lamp unit) within ±1°

Optical fiber

Length: 5 m, minimum bend radius: R 150 mm



Schémata

Dimentions of chemical solution concentration monitor CS-600F

Žádosti

  • Cleaning and etching processes in semiconductor manufacturing

Ke stažení

  • Technical Article

Industrial In-line and Multi Component Monitor Using Absorption Spectroscopy and Its Application (1.6MB)

Abstract
"Chemical concentration monitor, HORIBA CS series, is widely used in semiconductor wet process. Its measurement principle, Ultra Violet (UV) and Near Infrared (NIR) absorption spectroscopy, enables in-line and real-time monitoring for multiple component chemistry. Measuring various kinds of samples is achieved, such as Fe ion concentration in HCl, more than 5 component chemistry including by-product from etching, to H2O2 in CMP slurry. In this paper, measurement results for those samples are introduced."

Zdroje

  • Installation example
    The CS-600F monitor is compact in size; height has been reduced by 36%, volume by 40%, and the space required by the cell cables by 46% compared to previous models (CS-100F1 series).
    The light source unit and monitor main body can be installed remotely and in separate locations, which allows installation flexibility based on the locations of chemical solution unit and cleaning equipment.

Compact Design High-temperature Chemical Solutions Measurement and Stable Operation.

  • Measurement date of high-stability in-line measurement of high temperature chemical solutions (20 to 80℃)

The all-new optical system and improved processing algorithms enable in-line measurement of high temperature chemical solutions, a critical step for leading-edge wet processes. This eliminates the need to cool-down the chemical sample., HORIBA’s CS-600F provides a high-stability, enables more efficient and precise chemical solution management.

Please click the image.

High-stability, In-line Measurement of High Temperature Chemical Solutions (20 to 80℃)