Pressure Insensitive Mass Flow Module D500

The leading-edge, high performance pressure insensitive mass flow module installed with the differential pressure detection and the piezo actuator valve. Multi range/gas/pressure solution and G-LIFE Self-Diagnosis function.

Pressure Insensitive Mass Flow Controller  SEC-Z700X

High performance thermal sensor pressure insensitive mass flow module installed with piezo actuator valve. High reliability and all metal.