HE-960H-TM-S

HE-960H-TM,HE-960H-KOH,HE-960H-TM-S

고정밀 TMAH 농도 모니터

반도체 제조용 포토레지스트 현상액 주성분인 TMAH(Tetra Methyl Amnium Hydroxide) 농도를 정확하게 측정합니다. 반복성: +/- 0.003% 이내 측정 범위 : 0 - 3% 내화학성 카본센서를 장착합니다.

Segment: Semiconductor
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.
  • High precision. Repeatability: within +/- 0.003%.
  • Wide range measurement
        Concentration: 0 - 3%, Conductivity: 0 - 1000 mS/cm
  • Automatic display range switching
  • Enables three types of measurement: TMAH concentration, conductivity, and temperature
  • Chemical resistant carbon sensor
  • 24 V DC power supply
  • RoHS compliant
Model name HE-960H-TM-S
Target of measurement TMAH
Measurement range Concentration: 0 - 3%, Conductivity: 0 - 1000mS/cm
Repeatability Within +/- 0.003wt% (Temperature variation less than +/- 0.5℃, using equivalent input for conductivity)
Linearity Within +/- 0.003wt% (Using equivalent input for conductivity)
Transmission output Number of output: 4
Contact output Outputs: 5 points
Communication output RS-485
Power supply 24V DC +/- 10% 10W
Compatible sensor FES-510 Series
Wetted material of sensor GC, PFA, Karletz®

Schematics

Size: 1.56 MB
Brochures-Analyzers for Wet Process
Size: 1.8 MB
Readout47-Conductivity Meter with Carbon Electrodes and Application for Densitometers

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