MP-32S/M

개요

Cathodeluminescence MP-32S/M은 thermal 타입의 필드 에미션SEM을 사용하고 지금까지 불가능했던 미시영역에 있어서의 높은 분해능을 실현 sub Micron의 벽을 돌파했습니다.

기능

  • Spatial resolution: >50 nm
  • Monochromator mount with three gratings
  • Photon-counting photometry effective for measuring low intensity lights
  • Computer control of all functions of the monochromator

제조원 HORIBA

사양

Measurable wavelength range
200 – 900 nm (PMT)
200 – 1,100 nm (CCD)

CL condenser optical section
Ellipsoidal mirror
Mirror-hold mechanism and adjustment section
Ultraviolet – visible light fiber

Spectral section
Focal length: 32 cm monochromator (iHR320)
Beam-condensing unit
Embedded with three diffraction gratings

Detector
*Detector PMT
Cooling method: Air-cooled Peltier element
Bitmap
Cooling temperature: –30 ℃
Wavelength range: 200 – 900 nm
Bitmap

*Detector CCD
Cooling method: Air-cooled Peltier element
Cooling temperature: 70 K
CCD elements: 1,024 x 256 ch
Wavelength range: 200 – 1100 nm

Data processing unit
Computer unit (DOS/V compatible)
Display
Color printer
Photon counter
Beam-condensing unit
CL measurement software BIAMS-Ⅱ  

관련 제품

MP-VS series

SEM에 설치하여 Cathodoluminescence를 간단하게 측정가능.