TG-520 / CU-2 ambient ammonia gas analyzer
Overview
TG-520 and CU-2 Ambient ammonia analyzer in Semiconductor clean room is monitoring life time of chemical filter to remove ammonia gas, major basic proportional gas of chemical contamination component in clean room, in real time. It enables to get reliable measurement value to measure differential concentration between ambient nitrogen oxide and increased nitrogen oxide after oxidation catalyst reaction as ammonia concentration directly with cross-flow modulation type chemiluminescence method with 10ppb at min. detectable sensitivity.
Features
- System configuration of NOX analyzer unit with CU-2 converter unit to be oxidized NH3 into NO.
- No utility is required such as carrier gas and column.
Manufactured by HORIBA
Specifications
Measurement component | Ammonia(NH3）in clean room ambient air |
Measurement principle | Oxidation catalyst + chemiluminescence method |
Measurement range | 0～0.1/0.2/0.5/1.0ppm |
Lower detectable limit | 1ppb |
Repeatability | ±3.0％ of F.S. |
Linearity | ±2.0％ of F.S. |
Zero drift | ±2.0% of F.S./day |
Span drift | ±2.0% of F.S./day |
Response time(T90) | 300 sec. or less (from CU-2 converter unit) |
Sample gas flow rate | approx. 3.0L/min |
Operation gas | None |
Indication | Measuring value, alarm |
Alarm | CU-2: Temperature error in catalyzer unit |
Input / Output | 0～1V / 0～10V / 4～20mA(2 systems: either (1) momentary value and integrated of (2) moving average value) |
Temperature/Humidity | 0-40℃ 85% or less |
Power | AC100V 50/60Hz |
Power consumption | CU-2: approx. 200VA |
Dimension | CU-2: 430(W) X 450(D) X 310(H) mm |
Mass | CU-2: approx. 20kg |