Ion-Etched Gratings for Vacuum UV and Soft X-ray Applications

Holographic ion-etched lamellar master gratings for synchrotron and soft X-ray applications.

HORIBA Jobin Yvon’s holographic ion-etched lamellar gratings exhibit ultra-low stray light levels, making them ideal for synchrotron and soft X-ray applications. These gratings are fully compatible with the latest synchrotron systems, as they are fully engraved in the substrate material and can therefore withstand high thermal loads.

The holographic ion etching manufacturing process is compatible with most high-grade polished substrate materials, including:

  • Silicon,
  • Fused Silica

HORIBA Jobin Yvon produces holographic ion-etched gratings on plano, spherical, and toroidal substrates. We can tailor the groove distribution (i.e. constant spacing, aberration correction, or VLS) to optimize gratings for the most demanding applications.

Relevant features

  • Leading experience and expertise on VUV gratings,
  • Holographic ion-etched lamellar master grating,
  • Material: Silicon, Fused Silica, Pyrex,
  • Shape: plane, spherical, cylindrical, toroidal,
  • Low stray light and harmonics minimisation,
  • Type I or VLS custom design for synchrotron beamlines,
  • Coatings: Au, Ni, Pt.

VUV gratings types:

  1. Constant groove density: type I
    The groove density of the grating is defined by the interference of two plane wavefronts, resulting in a uniform and constant groove spacing along the grating length.
  2. Aberration-corrected groove density: type IV
    The groove spacing along the grating length is non-uniform, resulting from the interference of two spherical wavefronts. The non-constant groove density enables the correction of certain aberrations in the optical system.
  3. VLS groove density
    The Variable Line Spacing grating displays a groove-density variation that is defined by a polynomial law. This type of grating is commonly used in synchrotron beamline designs to correct for the defocusing of a grating monochromator. HORIBA Jobin Yvon and the synchrotron community together have developed software tools to define holographic recording geometries for VLS gratings, which allows us to produce gratings according to an arbitrary polynomial VLS law.

Ion-etched Variable Line Spacing (VLS) grating mounted in a synchrotron beamline