Ellipsometers
Spectroscopic Ellipsometer Product Range
Ellipsometry is an optical non destructive technique allowing the accurate characterization of thin films, surface and interface. Spectroscopic Ellipsometer is mainly used to determine thin film thickness (from 1Å to 30µm) and optical constants (n,k).
Spectroscopic Ellipsometers
Unique technologies providing the most sensitive, accurate measurement along with advanced thin film characterization capabilities.
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In-Situ and In-Line Ellipsometers
High precision, high speed monitoring and control of thin film deposition or etch processes.
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Thin Film Quality Control
NEW: Thin film thickness and optical constants in one click !
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Large Area Metrology Systems
Designed for the display and photovoltaic industries, capable to handle up to 8th generation display substrates.
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Software
DeltaPsi2 is a new generation of software based on a common GUI frame, and has been designed to provide intuitive and comprehensive user interaction with the system. The multitasking software provides the ultimate in versatility for use in ex-situ and in-situ configurations as well as the ability to drive fully automatic ellipsometers.
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