Ellipsometry tutorial

This comprehensive tutorial is an introduction to ellipsometry principles and applications. It also includes information about our various ellipsometer technologies.

Ellipsometry is a versatile thin film characterization technique that has applications in many different fields. This sensitive measurement technique provides unequalled capabilities for thin film metrology, and provides thin film thickness with angstrom resolution. As an optical technique, spectroscopic ellipsometry is non-destructive and contactless.