In-Situ / In-Line Ellipsometers

In-situ spectroscopic ellipsometers allow real-time monitoring and control of thin film deposition and etch processes with sub-monolayer resolution. It provides real-time calculation of film thickness, optical constants, and composition of thin film stacks in different ambient. The design of the ellipsometric heads facilitates the attachment to the process chamber or roll-to-roll system.

UVISEL In-Line Spectroscopic Ellipsometer

In-Line Spectroscopic Ellipsometer for Web Coater and Roll to Roll Systems

UVISEL In-Situ Spectroscopic Ellipsometer

In Situ Thin Film Process Control - Spectral Range from 190 to 2100 nm