XRF Spectroscopy

XRF spectroscopy is the technique of analyzing the fluorescent X-Rays in order to gain information on the elemental composition of a particular material.

The key components of a typical XRF spectrometer are:

  1. Source of X-Rays used to irradiate the sample.
  2. Sample.
  3. Detection of the emitted fluorescent X-Rays.

The resulting XRF spectrum shows intensity of X-Rays (usually in counts per second) as a function of energy (usually in eV).

There are two main types of XRF spectroscopy. Energy Dispersive XRF (EDXRF) and Wavelength Dispersive XRF (WDXRF), which differ primarily in the way the fluorescent X-Rays are detected and analyzed. These two forms are discussed in the two pages following.

XRF Spectrometer Schematic