Semiconductor Instruments & Systems
HORIBA offer a comprehensive range of fluid control and analytical solutions to improve yield, increase throughput and add value to the Semiconductor, FPD, PV and related manufacturing and research establishments.
Featured Product
CRITERION D200 series
The CRITERION D200 series is a pressure insensitive, wide range, high precision mass flow device. Stable flow rate control is guaranteed even with upstream and downstream pressure fluctuations. The advanced technology allows a turn down ration of 333:1 which means the user can control flows from 0.3% to full scale allowing a reduction in the number of gas lines.
Typical multi chamber gas lines have a line regulator, pressure sensor and filter to avoid mass flow controller crosstalk phenomenon caused by pressure fluctuations. The CRITERION D200 series capabilities eliminate the requirement of these components hence reduces the total cost and size of the gas cabinet. More Information
Products
HORIBA Group Companies
- HORIBA STEC - Fluid Control and Analysis
- HORIBA - Analytical Instrumentation
- HORIBA Advanced Techno - Chemical Monitoring
- HORIBA Jobin Yvon - Thin Film Metrology & In-Situ Process Control
14 Jun 2008 - Santa Clara, California, Global instrument maker HORIBA, celebrates the first anniversary of the...