Chemical Concentration Monitors

HORIBA’s chemical concentration monitors measure the concentration of various chemical materials i.e. SC-1, SC-2, SPM, HF etc. in real-time. This monitor can be used in the cleaning and etching processes within semiconductor manufacturing. Our chemical concentration monitors can measure up to eight components of multi components chemicals (depending on product model). We also have monitors to measure single component chemicals and ensure we can match your manufacturing process and facility. All our models are highly accuracy and stability. Choose from the bellow line-up the best chemical concentration monitor that meets your needs.

Chemical Concentration Monitor

Chemical Concentration Monitor CS-700

Enables highly stable, precise measurement of multi components chemical solution utilizing HORIBA's spectroscopic measurement technology

Fiber Optic Type Chemical Concentration Monitor CS-600F

Enables improved cleaning process efficiency with "high temperature chemical measurement", "stable operation" and "compact body size" to meet leading-edge process requirements.

Fiber Optic Type Chemical Concentration Monitor CS-100F1 Series

Support for multi-batu, single-bath, and dingle-wafer cleaning systems

Chemical Solution Concentration Monitor CS-100 Series

Chemicals soulution concentration monitor has a compact profile, support for multi-bath, single-bath, and dingle-wafer cleaning systems

HF Monitor

Low Concentration HF/HCl/NH3 Monitor HF-960M

High precision, high-speed measurement of low concentrations of HF, HCl, and NH3. Resistance sensor.

HF/HCl Concentration Monitor HF-960H

Middle range HF / HCl concentration Monitor. The sensor is highly resistant to chemicals.

Measurement range: 0 -10%

In-line Sensor & Auto Range Switching Model HF Concentration Monitor HF-960EM

Wide range HF concentration monitor from low to undiluted liquid. High precision measurement with auto range switching function. All PFA sensors.

Low Concentration HF Monitor in Diluted Sulfuric Acid/Hydrogen Peroxide HF-700

Provides continuous and precise measurement of hydrofluoric concentrations in diluted sulfuric acid and hydrogen peroxide at the ppm level.

Citric Acid Monitor

Citric Acid Monitor HE-960CA

High precision, wide-range citric acid monitor having chemical resistance sensor. Measurement range : 0 - 2%.

KOH Monitor

KOH Monitor HE-960H-KOH

High precision, wide-range KOH monitor having chemical resistance sensor. Measurement range : 0 - 20%.

TMAH Monitor

High Precision TMAH Concentration Monitor HE-960H-TM-S

High precision TMAH monitor can measure the range from 0 - 3 %. Chemical resistance carbon sensor. Suitable for management of TMAH concentration in developer solution.

Wide range TMAH Concentration Monitor HE-960H-TM

TMAH monitor can measure the wide range from 0 - 10 %. Chemical resistance carbon sensor. Suitable for management of TMAH concentration in developer solution.

Dissolved Ozone Monitor

Dissolved Ozone Monitor HZ-960

High precision, wide-range dissolved ozone monitor. In-line type sensor.

H2O2 Monitor HZ-960HPO-M

High stability measurement H2O2 concentration. Wide range measurement, 0 - 1000 ppm / 0 - 4000 ppm / 0 - 1% / 0 - 5%

Dissolved Oxygen Monitor

Dissolved Oxygen Meter in Low Concentration HF HD-960L

High stability measurement dissolved oxygen concentration in low concentration HF. Automatically switches between three measurement ranges from μg/L to mg/L. Measurement range : 0 - 20.00 mg/L.

Chemical Resistivity Meter

High Resistivity Meter HE-Z100-T

Improved maintenance of equipment such as chillers with solvent management by monitoring deterioration of solvents

Carbon Sensor Resistivity Meter HE-960R-GC(W)

Carbon sensor resistivity meter. Measurement range: 0 - 100.0 MΩ・cm

2-channel Carbon Sensor Resistivity Meter HE-960RW-GC(W)

Resostivity meter having the 2-channel carbon sensor. Measurement range: 0 - 100.0 MΩ・cm

Industrial Resistivity Meter HE-480R

Compact resistivity meter for versatile porpose. Measurement range: 0 - 100.0 MΩ・cm

Conductivity Meter

Carbon Sensor Conductivity Meter (Low concentration type) HE-480C-GC

Carbon sensor compact conductivity meter for low concentration. Measurement range: 0 - 9999 μS/cm (Sensor FS-07F), 0 - 999 μS/cm (Sensor ESH-01-L-GC5), 0 - 9999 μS/cm (Sensor ESH-1-L-GC9).

Carbon Sensor Conductivity Meter (High concentration type) HE-960HC

Wide range, carbon sensor conductivity meter for high concentration. Measurement rage: 0 - 1000 mS/cm

Carbon Sensor Conductivity Meter HE-960LC

Carbon sensor conductivity meter for low concentration. Measurement range: 0 - 1000 μS/cm, 0 - 10000 μS/cm (Sensor FS-07F)