Pressure Controllers and Regulators

HORIBA have various types of products which can control and regulate pressure in a gas supply line.

Our pressure controllers and regulators includes a digital high performance pressure sensor and piezo valve. The wafer cooling system uses helium gas to reduce the heat damage. The exhaust pressure controller maintains a consistent level of pressure in a chamber.

These elements contribute to yield enhancement in your manufacturing process.

Auto Pressure Regulator

Digital Auto Pressure Regulator

High performance auto pressure regulator with installed pressure sensor and piezo actuator valve. Digital/Analog and DeviceNetâ„¢ communications.

Piezo Actuator Valve

Piezo Actuator Valve PV Series

The fast response piezo actuator valves are equipped with metal diaphragms and metal O-rings.

Exhaust Pressure Controller

Exhaust Pressure Controller EC-5000 Series

The exhaust pressure controller maintains pressure within a chamber at any desired level. Equipped the high-resolution stepper motor and butterfly valve.

Wafer Back Side Cooling System

Wafer Back Side Cooling System GR-300 Series

High stability and accuracy pressure controller for back side wafer cooling in semiconductor manufacturing, installed piezo actuator valve and pressure sensor.