Pressure Controllers and Regulators
HORIBA have various types of products which can control and regulate pressure in a gas supply line.
Our pressure controllers and regulators includes a digital high performance pressure sensor and piezo valve. The wafer cooling system uses helium gas to reduce the heat damage. The exhaust pressure controller maintains a consistent level of pressure in a chamber.
These elements contribute to yield enhancement in your manufacturing process.
Auto Pressure Regulator
Piezo Actuator Valve
Exhaust Pressure Controller
Wafer Back Side Cooling System
High stability and accuracy pressure controller for back side wafer cooling in semiconductor manufacturing, installed piezo actuator valve and pressure sensor.