Liquid Source Vaporization System

Featuring the world's first sensor with a unique cooling method, the LF-F and LV-F series can measure and control chemicals which can not be measured by thermal sensors which heat the liquid.

The MI/MV series can efficiently vaporize liquids using a gas-liquid mixture that allows for complete vaporization, this in a unit not much larger than a mass flow controller.

The compact vaporization system (VC series) does not require carrier gas, it can be used with either a liquid or gas flow meter, allowing for easy integration for direct liquid injection.

Compact baking system suitable for a range of liquid source delivery applications.

The LU series automatic liquid refill system delivers chemicals directly to baking or direct liquid injection systems. Safe, efficient, and continuous supply of liquid sources.

The TL series enables large flow stable vaporization of liquid sources at atmospheric pressure.