Mass flow controllers SEC-E400J series

Overview

Smaller, less expensive equipment offering more functions is now considered a primary factor in increasing productivity. The demand for smaller, more cost-efficient and functional equipment applies with equal force to gas supply systems-and therefore to the key production devices known as mass flow controllers.

HORIBA STEC, which has always offered products that provide the performance required for the latest processes, has created the world’s solenoid actuator type mass flow controllers that offer terrific cost performance.

Features

  • Feature a metal O-ring                                                                                 Can be used with corrosive gases.
  • Error alarm function:                                                                                            A red light that illuminates in the main unit’s LED when an error occurs and an alarm output function (at point of contact) are standard.
  • Low cost                                                                                  The components have been redesigned for improved cost efficiency.

Manufactured by HORIBA STEC

Specifications

 

SEC-E440J

 

Materials at gas contact area

M: type, SUS316L, PTFE

Valve type

Close at power-off: C

Standard flow rate range

(N2 equivalent F.S.)

10/20/30/50/
100/200/300/500 SCCM
1/2/3/5/10 SLM

Flow rate control range

2 to 100% F.S.

Accuracy

± 1% F.S.

 

SEC-E450J

 

Materials at gas contact area

M: type, SUS316L, PTFE

Valve type

Close at power-off: C

Standard flow rate range

(N2 equivalent F.S.)

20/30 SLM

Flow rate control range

2 to 100% F.S.

Accuracy

± 1% F.S.

 

 

Schematics

schematics
schematics