• CRITERION

The name “CRITERION” is based on the Greek word “Kriterion,” meaning a reference, standard, or yardstick on which to base a judgment.
Aiming to become the world’s leading company in the fluid control field, HORIBA STEC created a new series of flow control modules and called it CRITERION. Engineers mainly from Japan and the US have brought new life to next-generation flow control modules.

  • Structure

Starting from the gas inlet, the device consists of an external particle protection filter, an inlet line pressure sensor, a control valve, a pair of pressure sensors, a flow resistor (flow restrictor), and a digital electric circuit. Not only does the gas channel contain no heat source, it is made entirely from metallic materials and has a polished interior surface as standard, making this an ultra-clean model.

 

Structure of CRITERION
Structure of CRITERION
  • Five characteristics of CRITERION's performance

CRITERION D500 Video