Selected Article: How pulsed operation has revolutionized Glow Discharge Optical Emission Spectrometry

By: Sofia GAIASCHI*, Patrick CHAPON, Akira FUJIMOTO, Tatsuhito NAKAMURA

February 27, 2019


Figure 1 View of the GD source with DIP

Author(*) Information: HORIBA FRANCE SAS

RF Glow discharge Optical Emission Spectrometry is a recognized analytical method for elemental depth profile analysis of surface and interfaces of solid layered materials. The possibility of easily pulsing the RF source has widened the application domains and enhanced the performances and for all recent applications, whether it is enhanced depth resolution, measurement of fragile materials, plasma cleaning or use of the GD source for SEM observation, pulsed operation is a key asset. In this paper we will illustrate the benefits of pulsed RF operation in Glow Discharge Optical Emission Spectrometry.

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