Ellipsometers
Spectroscopic Ellipsometer Options
A complete range of accessories are available for the UVISEL and the MM-16 Spectroscopic Ellipsometers to enhance and expand instrument performance and versatility. The modular design of the UVISEL and MM-16 allows the instrument to be easily upgraded during its lifetime to best suit changing application requirements.
XY motorized stage
 | Map thin film uniformity |
 The XY motorized stage provides automated stage movement for sample mapping. Additional features such as CCD camera monitoring and pattern recognition software combined with the integrated microspot optics delivers the ideal solution for accurate characterization of patterned wafers. | |
| Study anisotropic samples | |
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| Vary angle of incidence useful for sample mesurement at brewster angle and in transmission/reflection | |
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| Measure spectroscopic reflectance of sample at normal incidence | |
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| Study how film properties change with temperature, useful for thermal transition analysis of polymers, band structure of compound alloys | |
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| Study electrochemical processes | |
| Optical access to the sample is made via 3 fused silica windows. Two of the windows are mounted at 70º to normal for ellipsometry access, and the third port allows the user to observe the sample inside the cell. The cell body that comes into contact with the sample is manufactured from PVC, and the sample holder is manufactured from PTFE to avoid any interaction with the medium. The cell volume is 43 ml, and comprises an Ag/AgCl reference electrode and a platinum counter electrode. Electrical contacts are provided by robust, high integrity feedthroughs. | |
| For solid and solid/liquid experiments | |
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The liquid cell consists of a 30mm (L) x 30mm (W) x13mm (H) cuvette made of stainless steel, Teflon or PEEK polymer. It comprises two fused UV silica windows mounted at 70° allowing the light to pass through for the investigation of solid/liquid interfaces. It supports samples up to 4 mm thick and requires 12 ml of liquid for solid/liquid experiments. | |
For the characterization of thin films under non-air ambient... | |
The Sealed Cell has been designed for ellipsometric characterization of materials that are either sensitive to air or moisture or for experiments to study the effect of vapours / gases on material layers. | |
Maintain cold cryogenic temperature useful for the study of magnetic materials | |
| A cryostat option is available upon request, please contact us directly for more information. | |
Cost-effective benchtop metrology tool | |
| The compact integrated goniometer provides a cost-effective solution for benchtop UVISEL and MM-16 spectroscopic ellipsometers. This configuration is convenient for the majority of thin film applications.
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The rotation or q stage allows the automated 360° rotation of the sample, and is useful for characterization of complex anisotropic samples and liquid crystals.
The automatic goniometer provides automated variable angle measurements. The purpose of multiple angle acquisition is to increase the amount of data available for characterizing a material. Additionally, each material exhibits a Brewster angle that provides more sensitivity than others.
The low cost Reflectometry Module is available either as an option or as an upgrade for all current models of the VISible and NIR UVISEL Spectroscopic Ellipsometers as the module is simply connected to the Xenon lamp and monochromator of the UVISEL via two optical fibres. The RM allows Reflectance measurements at normal incidence over the wavelength range 210nm – 2100 nm with a 200 µm measurement spot.
The temperature controlled stage allows sample characterization at a range of temperatures (from -196°C to 600°C) for the investigation of new material properties (thermal transition analysis for polymers, band structure for compound alloys).
The electrochemical cell has been designed by HORIBA Jobin Yvon for the study of electrochemical processes using UVISEL and MM-16 spectroscopic ellipsometers. 
The liquid cell is designed to provide easy set-up and clean-up for any liquid and solid/liquid experiments using HORIBA Jobin Yvon spectroscopic ellipsometers. 
Sealed Cell for the Characterization of Thin Films under Non-Air Ambient Conditions using HORIBA Jobin Yvon Spectroscopic Ellipsometers. 