Analysis based on
Compact Reticle/Mask Particle Detection System PR-PD3
Overview
The PR-PD3 offers excellent throughput, a dependable optical system, and functions that reduce false detections. These features are blundled in a compact package that is designed to minimize running costs. The PR-PD3 also demonstrates great versatility thanks to its 0.5μm detection sensitivity.
Features
- The compact design.
- Low maintenance and operating costs
- Effective function for countering erroneous detection
Manufactured by HORIBA
Specifications
Specification Attribute | Specification Value |
Inspection object | Particles on reticle/mask with or without pellicle |
Principle | Laser scattering method |
Inspection time | Approx. 7 min/2 surfaces (5 inch reticle), Approx. 7 min from inspection start (switch ON) to test result display for two surface (5 inchs) inspection * High throughput model specific to the glass/pellicle (approx. 4 min. for two surface inspection) is also available. |
Detectable particle size | Pattern surface: 0.5 µm, Glass surface: 5.0 µm, Pellicle surface: 10.0 µm (* PSL equivalent) |
Reticle size | 5, 6 or 7 inch (Please specify when ordering.) |
Reticle cassette (Please specify when ordering) | Applicable to the HORIBA standard cassette for 5, 6, 7 inches as well as stepper cases unique to individual maker for 5, 6 inches. (Single size of reticle and cassette handling is the standard. Contact us as to the multiple cassette handling system.) |
Inspection result | Data mapping display on the FPD |
Dimensions | Approx. 900 (W) x 1350 (D) x 1590 (H) mm |
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Utilities | |
Installation site | Clean room or clean booth, class 100 or better |
Temperature | 23 ±1°C |
Power | 100 to 230 V AC, 7.5 to 5 A, 50/60 Hz, single phase |
Vacuum source | Pressure difference 8.0 x 104 Pa or more, 50 L/min |
Applications
- Measurement of particles on masks and reticle blanks in lithography process.
- In-coming QA inspection and Routine inspection