Application
Digital Mass Flow Controller SEC-N100 Series
Overview
For a wide variety of industries or applications. Can control wide range of full scale, from 10 SCCM to 1000 SLM, have various type of communications (digital/analog, DeviceNet™, CC-Link®, PROFIBUS™, and EtherCAT®, high accuracy (+/- 1.0% S.P. *1), and high-speed response. Also having multi-gas/multi-range function emphasize cost performance in your process.
*1 Excluding SEC-N17X Series
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Features
- Wide range of control, from micro to large flow, 10 SCCM to 1000 SLM.
- Wide variety of communications and power supply
Models | Select communication mode | Select power supply |
SEC-N102 series | Digital communication ▶RS485 F-NET Protocol Analog communication ▶0〜5VDC | ±15VDC(±5%) HORIBA'S lineup includes leased power supply PE series. |
SEC-N104 series | DeviceNet™ communication | Conforming to ODVA standards |
SEC-N105 series | CC-Link® communication Analog communication ▶0 to 5VDC, 0 to 10VDC 4 to 20mA | Conforming to CC-Link® standards 24VDC (13 to 32VDC) |
SEC-N106 series | PROFIBUS™ communication Analog communication ▶0 to 5VDC, 0 to 10VDC 4 to 20mA | Conforming to PROFIBUS™ standards 24VDC(13 to 32VDC) |
SEC-N107 | EtherCAT® communication | Conforming to EtherCAT® standards 24VDC |
- High S.P. accuracy: +/- 1.0% S.P. (*1)
- 1second high speed responce (*1)
- Multi-gas, multi-range solution
*1 Excluding SEC-N17X Series
The multi-gas, multi-range system has made it possible for the user to change the type of gas or full-scale flow rate freely.
Manufactured by HORIBA STEC
Specifications
Applications
- Integration into various manufacturing systems, including those for: semiconductors, LCDs, LEDs, photovoltaic cells, power semiconductors, optical fibers, coatings, etc.
- General industries: control of burner gases, control of atmospheric gases, generation of mixed gases, measurement of ventilation volume, etc.
- Research & development: equipment for performance evaluation of various gas sensors, catalysts, and combustors; biotechnology-related evaluation; etc.
- Laboratories: gas flow controllers for various experiments, sampling gases, etc.