Application
Semiconductor & FPD
Manufacturing Process Control
The reliable thermal sensor mass flow controller installed solenoid valve for a wide variety of industry. Wide control range from 10 SCCM to 200 SLM.
Low cost solenoid valve mfc's are suitable for flow control from 0.2sccm to 500slm N2 equivalent.
High stability, compact mixed injection vaporizer system using the new vaporization method, "tornado flow". Suitable for vaporizing liquid sources pyrolyzed easily.
Vaporize liquid source stably by the gas-liquid mixture vaporization method. Can be used for low temperature and large flow production.
The best-selling digital mass flow controller offering multi range/multi gas solutions. High accuracy, fast response, and compact size. All metal.
Endpoint controller for plasma etch cluster tools: Simultaneous Real Time Multi-Chamber - Multi diagnosis monitor
Designed to meet the demands of biologists and research scientists alike, the OpenPlex is a compact surface plasmon imaging system with an accessible platform.
The fast response piezo actuator valves are equipped with metal diaphragms and metal O-rings.