Semiconductor & FPD
Manufacturing Process Control

Achieves dramatic cost reductions in advanced mask inspections

High sensitive particle detection down to 0.35µm.

High-speed response and compact profile of the CS-131, SC-1 (standard clean) Solution Concentration Monitor makes it the ideal choice for single wafer and batch type cleaning devices.

High-speed response and compact profile make the SC-2 Solution Concentration Monitor the ideal choice for wafer and batch-type cleaning devices

Low cost solenoid valve mfc's are suitable for flow control from 0.2sccm to 500slm N2 equivalent.

High-speed response and compact profile make the SPM Solution Concentration Monitor the ideal choice for water and batch type cleaning devices

A range of fiber optic coupled Raman probe heads for remote analysis. Suitable for immersion and high temperature/pressure conditions.

High-speed response and compact profile make the TMAH/H2O2 Solution Concentration Monitor the ideal choice for wafer and batch type cleaning devices

HORIBA Scientific’s triple grating Raman spectrometers offer the ultimate in spectroscopic performance, and are ideally suited for fundamental research and advanced application of chemical analysis using Raman spectroscopy.

In-Line Spectroscopic Ellipsometer for Web Coater and Roll to Roll Systems