Application

HF / HCl Concentration Monitor HF-960H

概要

Accurately measures concentrations of HF and HCl used in semiconductor manufacturing and other processes. The dedicated FES-510 series sensor is highly resistant to chemicals, making this unit ideal for the management of HF and HCl. Measurement range: 0 -10%.

特征

Measurement range : 0 - 10 %
Automatic display range switching
Enables four types of measurement: HF concentration, HCl concentration, conductivity, and temperature
24 V DC power supply
RoHS compliant

制造: HORIBA Advanced Techno

規格

Model	HF-960H
Measurement range	HF: 0 - 10%, HCl: 0 - 10%, Conductivity: 0 - 1000mS/cm
Power supply	24 V DC ±10%, 10 W (max.)
Protective structure	Panel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type)
Mass	Approx. 550 g
Conforming standards	CE marking, FCC Part 15
Compatible sensors	FES-510 Series (flow-type carbon sensor)

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Technical Article

Conductivity Meter with Carbon Electrodes and Application for Densitometers Technologies for a Practical Densitometer (1.8MB)

Abstract
"2-pole electrical conductivity sensors with chemical resistant carbon electrodes are developed in 2002. These sensors are installed in the semiconductor wet process and used as a densitometer practically. The electrical circuit for 4-pole measurement was an innovation which improved the interface problem to the any 4-pole sensors. Single component concentration of HF or TMAH is measured from the conductivity, based on the precise measurement of conductivity and temperature, via individual temperature compensation of conductivity. Etching or developing solution should be controlled severely. Needs for monitoring solution based on the application of conductivity method are increased."