Application
Liquid Auto Refill System LU Series
Overview
The LU Series can offer uninterrupted, safe and reliable delivery of the liquid precursor to liquid material baking systems and injection systems, increasing uptime and reducing operator handling and risk of process contamination.
Includes a function for automatically implementing a remaining liquid purge sequence. Maintenance efficiency and product throughput have also been improved with the LU Series.
Features
- Vapour pressure monitoring function (patent pending) that checks the purge efficiency during the mother tank replacement comes as standard.
- A load cell monitoring the remaining amount of material in the mother tank is available as an option.
- Compact design, the LU-A1000 series uses an integrated gas system allowing for significant size reduction when compared with conventional fittings, with the added advantage of easy component replacement during routine maintenance.
- Degasifier module comes as standard reducing the risk bubbles within the liquid, making it ideal to supply a variety of vaporization systems, including injection and baking type applications.
- Safety standards: SEMI S2/S8/S14, CE mark.
- Improved safety: A variety of monitoring devices provides total automatic control. The LU-A1000 series is equipped with an automatic emergency shutdown function that is activated should a system problem occur.
- Improved operability: Operating sequences have been automated to prevent operation errors. Operations can also be easily controlled with a touch panel on the front of the unit.
Manufactured by HORIBA STEC
Specifications
Model | LU-A1000 series |
Liquids supported | TEOS, TMOB, TMOP, TEOP, BTBAS |
Supply method | Pressure movement from He gas |
Gas supply pressure | For pressure movement: 0.3 to 0.6 MPa (G); For purge: 0.3 to 0.6 MPa (G), OP N2 0.6 to 0.7 MPa (G) |
Tank | Maximum 5-gallon container can be attached (outside of production range) |
Operation | Automatic supply/stop using external signal from supply system |
Operation area display details | Pressure error display; When an alarm is triggered: Display hold function (manual reset); Liquid level display; Sequence, etc. |
Gas connection | Refer to basic flow |
Power source | AC 100 to 240 V, 50/60 Hz, 300 VA |
Electricity connection | AC 100 to 240 V breaker connection, signal receptacle |
External dimensions | See external dimensions diagram |
* Please make decisions regarding the specifications above after meeting with STEC. | |
Schematics
