Specifications (Last updated in August, 2022)
*1 Please contact HORIBA STEC regarding chemical and/or full-scale concentration other than those shown above.
*2 The specification is guaranteed under the standard conditions of HORIBA STEC.
Ambient temperature: 23±2°C, Gas cell temperature: 60°C, Measurement flow rate: 1000 SCCM, Calibration gas: C3H8 balanced in N2 at 105 kPa(A)
*3 Accuracy is based on concentration of the calibration gas.
*4 Gas replacement time (Td: time delay) is not included in the response.
The typical Td in our inspection equipment is approx. 1.0 second.
The response without moving average is approx. 1.5 second. It is necessary to change # of moving average of firmware settings by digital communication.
*5 Recommended operating condition. The performance is guaranteed on the standard condition.
*6 Required specification of temperature controller:
Control cycle: 1 second or less, PID control with auto tuning function
*7 Optional wetted material: Body: SUS 316L, Gas cell optical window: Sapphire, Ni, Al
*8 The height of IR-315 is 145mm