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〈Catalog〉Dissolved oxygen concentration monitor series for semiconductor manufacturing
HD-960LR
Dissolved oxygen concentration monitor series for semiconductor manufacturing
Ideal for measuring dissolved oxygen concentration in Wet Process from Front-end of Line to Back-end of Line.By adopting a chemical resistant sensor, it is possible to support a wide range of dissolved oxygen concentration measurements from facility to process usage.
Segment: Semiconductor
Division: Wet Process Control
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.
The latest model of dissolved oxygen monitor HD-960LR
Dissolved oxygen concentration can be measured even with the chemical conditions below.
- Ammonia concentration is 1% or lower, sample temperature is 25 ℃ ±2 ℃
- Organic solvent with boiling point higher than water
Able to measure dissolved oxygen concentrations of more types of chemicals used in semiconductor processes.
■ Comparison with previous models
| Latest model | Previous models | ||
|---|---|---|---|
| High flow rate and long life | High flow rate (Sample to circulate) | Low flow rate (Sample to drain) | |
| Model | HD-960LR | HD-960L-M | HD-960L |
| Sensor unit dimensions | W170 (200 ) x H95 x D135 | W120 (150 ) x H95 x D108 | W87 (117 ) x H131 x D94 |
| Flow rate | 600 - 2000 mL/min (Sensor membrane: 25 μm) 400 - 2000 mL/min (Sensor membrane: 50 μm) | 200 - 2000 mL/min (Sensor membrane: 25 μm/50 μm) | 15 - 200 mL/min （Sensor membrane: 25 μm/50 μm) |
| Temperature | 20- 60 ℃ | 20- 60 ℃ | 10- 45 ℃ |
| Pressure | 0 - 0.2 MPa | 0 - 0.2 MPa | 0 - 0.01 MPa |
| Response speed | 30 sec (90%) @400 mL/min | 30 sec （90%） @400 mL/min | 30 sec (90%) @200 mL/min |
| Sample | Ammonia concentration is 1% or lower,sample temperature is 25 ℃ ±2 ℃ Organic solvent with boiling point higher than water. | Pure water Low concentration HF (5700 ppm or less) | Pure water Low concentration HF (5700 ppm or less) |
| Equipment configuration | Converter: HD-960LR Sensor unit: DO-120 Bottle unit: DO-120-B Sensor: 5622 Connection cable: CK-05PS (5 m) Relay cable: CK-01DO (1 m) | Converter: HD-960L-M Sensor unit: DO-110 Sensor: 5611 Connection cable: CK-05PS （5 m） | Converter: HD-960L Sensor unit: DO-100 Sensor: 5600 Connection cable: CK-05PS （5 m） |
■Measurement data (In-house reference data)
 | Measurement condition▶ Sample: Ammonia (28%)
Measurement resultAbnormal measurement tends to occur within 5
|  |
 | Measurement condition▶ Sample:Organic solvent
Measurement resultAbnormal measurement tends to occur within 5
|  |