HE-200R

Field-installation type electric resistivity meter (resistivity meter)

For measuring the electric resistivity of UPW (ultra-pure water).

Combined with the electric resistivity sensor (ERF series), it measures the electric resistivity and temperature of aqueous solutions. Suitable for measuring electric resistivity of UPW.

RESIST

Division: Process Water
Fabricant: HORIBA Advanced Techno Co., Ltd.

Enables measurements with minimal error

Measurements are affected less by ambient temperature and sample temperature, enabling accurate measurements with less error.

We provide equipment and sensor calibration services

Temperature sensor offset calibration is offered as well as converter and sensor combination calibration services. *Option

Highly responsive temperature sensor

Helps to minimize fluctuations in measurement values due to delayed temperature compensation in the event of sudden changes in water temperature.

Product nameResistivity meter
ModelHE-200R
Combined
sensor
2-electrode method resistivity sensor (ERF-001 Series) of cell constant 0.01/cm
Measuring rangeResistivityMΩ•cm0.000 to 2.0000.00 to 20.00 (*Note 1)
kΩ•cm0.00 to 20.000.0 to 200.0 (*Note 1)
Temperature0℃ to 100℃ (Display range: −10℃ to 110℃)
Display
resolution
ResistivityAs shown in the measuring table.
Temperature0.01℃
PerformanceResistivityRepeatabilityWithin ±0.1% of the full scale (response for equivalent input)
LinearityWithin ±0.5% of the full scale (response for equivalent input)
TemperatureRepeatability±0.1℃ (response for equivalent input)
Linearity±0.5℃ (response for equivalent input)
Transmission
output
Number of output2 (The negative terminals for transmission outputs are internally connected at the same electric potential)
Output type4 mA to 20 mA DC: input/output isolated type
Load resistanceMaximum: 900Ω
LinearityWithin ±0.08 mA (output only)
RepeatabilityWithin ±0.02 mA (output only)
Output rangeOutput 1Resistivity: Free setting within a measuring range.
Output 2Temperature: Free setting within a range between −20 and 130℃
Occasional out for errorHold or burnout to either 3.8 mA or 21 mA
Transmission holdIn the maintenance mode, transmission signal is held at the latest value or preset value.
In the calibration mode, transmission signal can be alive or held.
Contact outputNumber of output3
Output typeNo-voltage contact output
Contact typeRelay contact; SPDT (1c)
Contact capacity250 V AC, 3 A; 30 V DC, 3 A (resistance load)
Contact
function
R1, R2Selectable from upper limit alarm, lower limit alarm, and currently holding of transmission output.
(The contact is closed during alarm operation, opened normally and while the power is down.)
FAILError alarm
(Closed in the normal state, opened in the failure state or while the power is down.)
Alarm setting range
  • Setting range: within a measuring range
  • Delay time: 0 to 600 seconds
Contact inputNumber of input points1
Contact typeNo-voltage "a" contact for open collector
ConditionsON resistance: 100 Ω max.
Open voltage: 24 V DC
Short-circuit current: 12 mA DC max.
Contact functionExternal input for transmission holding.
Transmission
capability
MethodRS-485
Signal type2 wire system, isolated from the input circuit
Not isolated from transmission circuit
Temperature
compensation
Applicable temperature
element
Platinum resistor: 1 kΩ (0℃)
Compensation method
  • Temperature characteristic of NaCl (reference temperature: 5℃ to 95℃)
  • Arbitrary temperature coefficient input (reference temperature: 5℃ to 95℃; temperature coefficient: +/−3%/℃)
  • No temperature compensation
    One of the three ways of compensation is selectable.
    (In the de-ionized water area, the temperature compensation for pure water is automatically performed in both NaCl and arbitrary temperature coefficient compensation settings.)
Temperature compensation
range
0℃ to 100℃ (However, the compensation calculation is extended lower than 0℃ or higher than 100℃.)
CalibrationResistivityBased on parameter input of coefficient for the sensor cell constant.
TemperatureComparison to the accurate thermometer
Both deviation and coefficient of RTD are taken into account for calibration.
Other functionUPW standard resistivity inputSelect one from the next.
182.3 kΩ•m (standard), 181.8 kΩ•m, 182.4 kΩ•m,
18.23 MΩ•cm (standard), 18.18 MΩ•cm, or 18.24 MΩ•cm
Clipping functionIf the measured value exceeds the user setting value for clipping, the measured data will be held at the clipping value.
Self-checkSensor diagnostic errorTemperature sensor short-circuit, temperature sensor disconnection, and out of the temperature measurement range
Converter errorCPU, ADC, and memory errors
Operating
temperature
range
−20℃ to 55℃ (without freeze)
Operating
humidity range
Relative humidity: 5% to 90% (without condensation)
Storage
temperature
−25℃ to 65℃
Power supplyRated power supply voltage100 V to 240 V AC ±10% 50/60 Hz
Power consumption15 VA (max)
OtherWith power switch for maintenance use
Compatible
standards
CE markingEMC    :EN61326-1
     Class A, Industrial electromagnetic environment
Safety   :EN61010-1
RoHS    :EN50581
      9. Industrial monitoring and control instruments
FCC rulesPart15 Class A
StructureInstallationOutdoor installation type
Installation methodMount on 50 A pole or wall
Protection codeIP65
Case materialAluminum alloy (coated with epoxy-denatured melamine resin)
Material of fittingsSUS304
Material of hoodSUS304 stainless steel (coated with epoxy denatured melamine resin)
Material of windowPolycarbonate
Display elementReflective monochrome LCD
External
dimensions
180 (W) mm × 155 (H) mm × 115 (D) mm (excluding cover and mounting brackets)
MassMain body: Approx. 3.5 kg; cover and mounting brackets: Approx. 1 kg

Note

  • Note 1  : Without temperature compensation, 0.0-100.0 MΩ•cm(0-1000 kΩ•m) can be displayed.
  • Note 2  : When the sensor cable, the transmission cable, or the contact input cable is extended by 30 m or more, the surge test under the EMC Directive for CE marking is not applied.
  • Note 3  : An arrester (spark over voltage: 400 V) is implemented for transmission output, contact input, and communication. However, use a most suitable surge absorption element on the connection lines in accordance with the ambient environment, the situation of equipment installed, and the externally connected equipment.

Request for Information

Do you have any questions or requests? Use this form to contact our specialists. * These fields are mandatory.

Related products

CS-600F
CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-620F
CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-900
CS-900

Non-Contact Chemical Concentration Monitor

HC-200F
HC-200F

Field-installation Type Simplified Fluoride Ion Concentration Meter(Four-Wire Transmission)

HC-200NH
HC-200NH

Field-installation type ammonia nitrogen meter

HC-300F
HC-300F

Field-installation Type Simplified Fluoride Ion Concentration Meter(Two-Wire Transmission)

HD-200
HD-200

Field-installation type dissolved oxygen meter (DO meter)

HD-200FL
HD-200FL

Field-installation type optical dissolved oxygen meter (DO meter)

HD-300
HD-300

Field-installation type dissolved oxygen meter (DO meter)

HD-480
HD-480

Panel-mount type dissolved oxygen meter (DO meter)

HD-960L
HD-960L

HF (Hydrofluoric Acid)  DO (Dissolved Oxygen) Monitor / Pure Water DO (Dissolved Oxygen) Monitor

HD-960LR
HD-960LR

Dissolved Oxygen Concentration Monitor Series for Semiconductor Manufacturing

HE-200C
HE-200C

Field-installation type electric conductivity meter (conductivity meter)

HE-200H
HE-200H

Field-installation type electric conductivity meter

HE-300C
HE-300C

Field-installation type electrical conductivity meter (conductivity meter)

HE-300R
HE-300R

Field-installation type electric resistivity meter (resistivity meter)

HE-480C
HE-480C

Panel-mount type conductivity meter (conductivity meter)

HE-480C-GC
HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

HE-480H
HE-480H

Panel-mount type conductivity meter (conductivity meter)

HE-480R
HE-480R

Panel-mount type resistivity meter (resistivity meter)

HE-480R(W)
HE-480R(W)

Resistivity Meter for Semiconductor Cleaning Processes

HE-960CA
HE-960CA

Citric Acid Monitor

HE-960CW
HE-960CW

Panel-mount type 2-channel conductivity meter (conductivity meter)

HE-960H-KOH
HE-960H-KOH

KOH Monitor

HE-960H-TM
HE-960H-TM

Wide range TMAH Concentration Monitor

HE-960H-TM-S
HE-960H-TM-S

High Precision TMAH Concentration Monitor

HE-960HC
HE-960HC

Carbon Sensor Conductivity Meter (High concentration type)

HE-960HI
HE-960HI

Panel-mount type conductivity meter

HE-960LC
HE-960LC

Carbon Sensor Conductivity Meter

HE-960LF / FS-09F-1/2
HE-960LF / FS-09F-1/2

Flat Carbon Sensor Conductivity Meter

HE-960R-GC
HE-960R-GC

Carbon Sensor Resistivity Meter

HE-960RW
HE-960RW

Panel-mount type 2-channel electric resistivity meter (resistivity meter)

HD-200
HD-200

Field-installation type dissolved oxygen meter (DO meter)

HD-300
HD-300

Field-installation type dissolved oxygen meter (DO meter)

HD-480
HD-480

Panel-mount type dissolved oxygen meter (DO meter)

HD-960L
HD-960L

HF (Hydrofluoric Acid)  DO (Dissolved Oxygen) Monitor / Pure Water DO (Dissolved Oxygen) Monitor

HD-960LR
HD-960LR

Dissolved Oxygen Concentration Monitor Series for Semiconductor Manufacturing

HE-200C
HE-200C

Field-installation type electric conductivity meter (conductivity meter)

HE-200H
HE-200H

Field-installation type electric conductivity meter

HE-300C
HE-300C

Field-installation type electrical conductivity meter (conductivity meter)

HE-300R
HE-300R

Field-installation type electric resistivity meter (resistivity meter)

HE-480C
HE-480C

Panel-mount type conductivity meter (conductivity meter)

HE-480C-GC
HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

HE-480H
HE-480H

Panel-mount type conductivity meter (conductivity meter)

HE-480R
HE-480R

Panel-mount type resistivity meter (resistivity meter)

HE-480R(W)
HE-480R(W)

Resistivity Meter for Semiconductor Cleaning Processes

HE-960CA
HE-960CA

Citric Acid Monitor

HE-960CW
HE-960CW

Panel-mount type 2-channel conductivity meter (conductivity meter)

HE-960H-KOH
HE-960H-KOH

KOH Monitor

HE-960H-TM
HE-960H-TM

Wide range TMAH Concentration Monitor

HE-960H-TM-S
HE-960H-TM-S

High Precision TMAH Concentration Monitor

HE-960HC
HE-960HC

Carbon Sensor Conductivity Meter (High concentration type)

HE-960HI
HE-960HI

Panel-mount type conductivity meter

HE-960LC
HE-960LC

Carbon Sensor Conductivity Meter

HE-960LF / FS-09F-1/2
HE-960LF / FS-09F-1/2

Flat Carbon Sensor Conductivity Meter

HE-960R-GC
HE-960R-GC

Carbon Sensor Resistivity Meter

HE-960RW
HE-960RW

Panel-mount type 2-channel electric resistivity meter (resistivity meter)

HE-960RW-GC
HE-960RW-GC

2-Channel Resistivity Meter

HF-700A
HF-700A

Low Concentration Monitor- Sulfuric Acid/Hydrogen Peroxide

HF-960H
HF-960H

HF / HCl Concentration Monitor

HF-960M
HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

HO-200
HO-200

Field-installation type ORP meter

HO-300
HO-300

Field-installation type ORP meter

HO-480
HO-480

Panel-mount type ORP meter

HR-200
HR-200

Field-installation type polarographic residual chlorine meter

HR-200RT
HR-200RT

Field-installation type residual chlorine meter

HR-480
HR-480

Panel-mount type galvanic residual chlorine meter

HT-110
HT-110

On-line TOC analyzer

HZ-960HPO-M
HZ-960HPO-M

H2O2 Monitor

Water & Liquid Corporate