CS-100 Series

Stand-alone Type Chemical Concentration Monitor

The CS-100 Series offers a complete lineup of high precision chemical solution concentration monitors for various solutions in cleaning and etching processes during semiconductor manufacturing. In addition to the high-speed response and compact design, measurement of each component concentration is conducted in real-time and the timing of chemical solution changes and automatic supply is warned with an alarm. The ability to perform short measurement cycles allows for accurate monitoring of concentration changes.

Example of chemicals can be measured

Segment: Semiconductor

Division: Wet Process Control

Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Concentration follow-up in real-time
Fully automatic measurements
Comprehensive measure to eliminate air bubble during sequential measurements
A higher safety assurance by using 24 V DC
Lightweight and compact design
A higher overall yield
RoHS compliant

Model name	CS-100
Measurement principle	Absorption spectroscopic method
Sample temperature	20 to 30 Degree C
Ambient temperature	20 to 25 Degree C
Components	Max. 4 components
Chemical range	Max. 4 ranges
Communication	Parallel I/O, Analog output, RS-232C
Analog output (4-20 mA)	Max. 2 components
Dimension	205(W) X 329(D) X 269(H)mm
Power source	DC 24V
Consumable parts	Halogen lamp
Wavelength	UV/NIR
Wetted material	PTFE, PFA, Sapphire or Quartz