CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

The CS-100F1 Series is equipped with fiber optics cable based on the CS-100 Series. It offers real-time, in-line measurements by directly integrating the sample cell into the cleaning system piping and by using a fiber optic cable for light signal transmission. A single concentration monitor can take up to four measurements and monitoring of multiple chemical solutions in a single-bath or single-wafer cleaning system is also possible.

Example of chemicals can be measured

Segment: Semiconductor

Division: Wet Process Control

Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Concentration follow-up in real-time using in-line cells
Real-time concentration monitoring is made possible by using an in-line cell that directly connects to the main piping of the cleaning system.
Multi monitoring of up to four types
A single monitor can measure up to four types of chemical solutions or ranges. You can monitor the concentrations of more than one chemical solution (or differing chemical solution ratios) in a single lot, like single-bath or single-wafer cleaning system.
Cell unit type for higher accuracy
Emphasizing stability, a cell unit type is also available that supports feedback control using a monitor output. It is also possible to keep the chemical solution concentration within an accepted range and eliminate unnecessary chemical solution changes.
Safe installation by complete isolation of electrical and measurement sections
RoHS compliant

Model	CS-151F1	CS-152F1	CS-150F1
Target of measurement	SC-1 (ammonia/hydrogen peroxide aqueous solution)	SC-2 (hydrochloric acid/hydrogen peroxide aqueous solution)	SPM (sulfuric acid/hydrogen peroxide aqueous solution)
Target of measurement	Multi-monitoring with one unit of up to 4 types of chemical solutions or ranges possible.
Measurement principle	Absorption spectrometry
Concentration computation principle	Temperature-compensated multivariate analysis
Measurement range (mass %)	NH₃: 0.00% to 1.00% H₂O₂: 0.00% to 5.00% H₂O: 94.0% to 100.0%	HCI: 0.00% to 2.00% H₂O₂: 0.00% to 2.00% H₂O: 96.0% to 100.0%	H₂SO₄: 70.0% to 96.0% H₂O₂: 0.00% to 10.00% H₂O: 4.0% to 30.0%
Repeatability (mass %) (within ±1% room temperature)	NH₃: ±0.15% H₂O₂: ±0.30% H₂O: ±1.5%	HCI: ±0.15% H₂O₂: ±0.15 % H₂O: ±1.5%	H₂SO₄: ±0.50% H₂O₂: ±0.50% H₂O: ±1.5%
Repeatability (mass %) (within ±1% room temperature)	・Repeatability for the list above is for the cell unit type.Please contact us for the repeatability of the in-line cell type. ・Differences in the above list may occur depending on measurement range.(Please see our website for details.)
Sample solution temperature	20 to 80: (when using Inline cell) 20 to 30: (when using cell unit)
Measurement cycle	Approx. 3 seconds
Content of LCD and input	• 1st component: measured concentration value (%) •Error code • 2nd component: measured concentration value (%) •Parallel concentration alarm output invalid status • 3rd component: measured concentration value (%) •Serial/parallel status • 1st and 2nd components: concentration alarm status •Background compensation data
RS-232C serial input	• Serial/parallel status switching •Parallel concentration alarm output status • Measurement data transfer request (valid/invalid) • 1st and 2nd component concentration alarm setting •Target measurement solution switching
Parallel input	12 to 30 V DC (photocoupler insulated) • Parallel concentration alarm output • Target measurement solution switching • Background compensation
Parallel output	Open collector output (photocoupler insulated) • 1st component concentration alarm, 4 types Max. current when on: • 2nd component concentration alarm, 4 types DC 5 mA (no internal protection resistor) • Device error Max. impressed voltage when off: 30 V DC • Measuring • Target measurement solution type • Background compensation status
Solution temperature input	Terminal block connection (M3 terminal screws) • Platinum resistance temperature sensor: Pt100 (Pt100 sensor should be prepared by customers)
Analog output	• 1st component concentration alarm, 4 types: 4 to 20 mA • 2nd component concentration alarm, 4 types: 4 to 20 mA ✽We also support other measurement ranges. Please specify when ordering.
Fiber optic cable	Dedicated CS-100F1 Series fiber optic cable (25 ±15: installation temperature)
Sample cell	We can supply dedicated sample cells (inline cell or cell unit) for various kinds of chemical solutions.
Power supply	100 V to 230 V AC (single phase) ±10%, 50/60 Hz, approx. 100 VA
Dimensions	205 (W) x 329 (D) x 269 (H) mm 8.1 (W) x 13.0 (D) x 10.6 (H) in (excluding protruding part)
Weight	Approx. 11 kg