HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

The HF-960M uses sensors that offer outstanding corrosion resistance for high-precision, high-speed measurement of low concentrations of hydrofluoric acid, hydrochloric acid and ammonia, and is thus perfect for single-bath and wafer cleaning. The HF-960M is also an environmentally-friendly product that uses lead-free solder for mounting chips on the PCB.

Segment: Semiconductor

Division: Wet Process Control

Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Precise measurement of low HF concentrations
5 types of measurement available
HF, HCl & NH₃ concentrations, conductivity, and temperature
The analog output range can be arbitrarily set with to the concentration measuring range
The HF-960M provides 7 output points
3-channel transmission output
RoHS compliant
DC 24 V Power Source
CE Marking compliant

Product name	Low Concentration Type HF / HCl / NH₃ Concentration Monitor
Model	HF-960M
Measurement range	HF: 0 - 5000 ppm, HCl: 0 - 5000 ppm, NH₃: 0 - 10000 ppm, Conductivity:0 - 50.0 mS/cm
Power supply	Rated voltage 24 V DC, 10 W (max)
Structure	Iindoor-use, panel installation type, panel case : ABS, terminal : PBT, Panel : IP65 dust and water proof structure
External dimensions	96 (W) x 96 (H) x 115 (D) mm, Case depth : approx.105 (when panel-mounted)
Weight	Approx. 550 g
Conforming standards	CE marking, FCC Part15
Compatible sensors	FS-10F series flow-type sensor