Dry Etching

Dry etching refers to the removal of material, typically a masked pattern of semiconductor material, by exposing the material to a bombardment of ions (usually a plasma of reactive gases such as fluorocarbons, oxygen, chlorine, boron trichloride; sometimes with addition of nitrogen, argon, helium and other gases) that dislodge portions of the material from the exposed surface. A common type of dry etching is reactive-ion etching. Unlike with many (but not all, see isotropic etching) of the wet chemical etchants used in wet etching, the dry etching process typically etches directionally or anisotropically.

Fluid Controller & Module

SEC-Z500X Series
SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

SEC-Z700S Series
SEC-Z700S Series

New concept Pressure Insensitive Mass Flow Module

SEC-Z700X Series
SEC-Z700X Series

Pressure Insensitive Mass Flow Controller

VC Series
VC Series

Direct Liquid Injection System

PV Series
PV Series

Piezo Actuator Valve

UR-Z700 Series
UR-Z700 Series

Digital Automatic Pressure Regulator

Process Monitor & Endpoint Detector

Micropole System QL Series
Micropole System QL Series

Quadrupole Mass Analyzer

VG-200S
VG-200S

Capacitance Manometer

EV 2.0 Series
EV 2.0 Series

Endpoint / Chamber Health Monitor based on Optical Emission Spectroscopy and MWL Interferometry

EV-140C
EV-140C

Optical Emission Spectroscopy Etching End-point Monitor

IT-480 series
IT-480 series

High-Accuracy Infrared Thermometers [Stationary type]

IT-270
IT-270

High-Accuracy Infrared Thermometer [Built-in type]

LEM Series
LEM Series

Camera Endpoint Monitor based on Real Time Laser Interferometry

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