Semiconductor manufacturing plants require a safe and stable supply of high-quality gases and chemicals.
In particular, semiconductor manufacturing processes such as CVD and Diff use large amounts of various deposition materials. (TEOS, TiCl4, TEB, HCDS, TMA, etc.) By using bulk tanks and process tanks, HORIBA's Liquid Auto Refill System, LU Series, is able to continuously supply the liquid while managing the remaining amount, which contributes to the stable operation of semiconductor plants.