Fluid Control

Technology to instantly and accurately measure and control fluid flow rates

Fluids such as gases and liquids are essential in the manufacturing processes of a wide range of industries, including semiconductor devices, liquid crystal displays, LEDs, and solar panels. In particular, in the manufacturing of cutting-edge devices, the accurate measurement, control, and analysis of fluids with various characteristics significantly impacts production efficiency and quality. HORIBA will further develop the fluid measurement and control technologies that HORIBA STEC has cultivated since its founding in 1974, and support productivity improvement and quality assurance in a wide range of industrial fields.

Fluid Measurement and Control

Utilizing measurement principles such as thermal and differential pressure, the Criterion measures a wide range of fluids, from corrosive gases to ultra-high purity liquids, with high precision.

Liquid Vaporization

A stable supply is realized by selecting the optimal vaporization method depending on the properties and composition of the liquid material, the application and the equipment design. 

Vacuum Measurement

As a diaphragm vacuum gauge, the VG ensures stable pressure measurement and reproducibility, contributing to process optimization, improved equipment uptime, and enhanced yield.

Quadrupole Mass Spectrometry

The QL’s compact design enables space-saving installation. It contributes to process condition management through residual gas analysis of the vacuum chamber and can serve as a process monitor.

▶ Technology

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