Electric & Electronic Machinery, Instrument

Low running costs thanks to a compact design, plus remarkable versatility

Integrated management with an in-situ real time monitor "DIGI Series" for next-generation thin-film processes

High performance auto pressure regulator with installed pressure sensor and piezo actuator valve. Digital/Analog and DeviceNet™ communications.

This is an oxygen and nitrogen elemental analyzer with high accuracy and repeatability suiting to cutting-edge technology's R&D as well as quality control in the market of steel, new materials, catalyst and so on. This is a new generation model optimized to fit to user's requests.

Support for multi-batu, single-bath, and dingle-wafer cleaning systems

24-hour real-time monitoring of FPM solution concentrations in semiconductor wet-etching processes

GA-370 : Continuous and ultrahigh-sensitivity measurement of trace impurities (CO, CO₂and CH₄) in high-purity gas.

The IR-150 is designed for real time inline concentration measurement using a Non-dispersive infrared (NDIR) method

The GD-Profiler 2™ provides fast, simultaneous analysis of all elements of interest including the gases nitrogen, oxygen, hydrogen and chlorine. It is an ideal tool for thin film characterization and process studies.

The HORIBA Scientific GD-Profiler HR™ gives the optimum in terms of resolution and number of elements to solve analytical problems even in the most complex matrices.