Electric & Electronic Machinery, Instrument

High-speed response and compact profile make the TMAH/H2O2 Solution Concentration Monitor the ideal choice for wafer and batch type cleaning devices

The TRIAX 180 is a compact imaging spectrometer with high throughput and complete automation.

The TRIAX 190 is the most compact imaging spectrometer available offering both interchangeable triple grating turret and automated dual exit port selection.

Products: UVISEL Plus: 190-920 nm | NIR Option: 2100 nm

Measure thin film thickness and optical constants. The reference ellipsometer for research and process development.

Integrated Spectroscopic Ellipsometer and Spectroscopic Reflectometer

Single point analysis and automated hyperspectral imaging.

Dual vacuum modes.

Spot sizes from 1.2 mm to 10 µm.