Photovoltaic

The UVISEL ER-Extended Range spectroscopic ellipsometer covers a wide spectral range from 190 to 2100 nm.

The UVISEL FUV spectroscopic ellipsometer extends the UVISEL VIS down to 190 nm.

The UVISEL NIR spectroscopic ellipsometer extends the UVISEL VIS in the near infrared spectral range up to 2100 nm.

Products: UVISEL Plus: 190-920 nm | NIR Option: 2100 nm

Measure thin film thickness and optical constants. The reference ellipsometer for research and process development.

Integrated Spectroscopic Ellipsometer and Spectroscopic Reflectometer

The UVISEL VIS spectroscopic ellipsometer covers the spectral range from 210 to 880 nm, and can be easily extended in both FUV and NIR range (see UVISEL FUV and NIR models). The measurement is performed in a few minutes and is extremely repeatable.

High stability and accuracy pressure controller for back side wafer cooling in semiconductor manufacturing, installed piezo actuator valve and pressure sensor.