Industry
Low cost mass flow controller SEC-400MK3/500MK3
Overview
Low cost model of SEC-400 series
Features
- Flow rate control valve Thermal valve
- Low cost
Manufactured by HORIBA STEC
Specifications
SEC-400MK2
Materials at gas contact area | SUS316, Viton® |
---|---|
Valve type | Open at power-off: O |
Standard flow rate range (N2 equivalent F.S.) | 10/20/30/50/100 200/300/500 SCCM 1/2/3/5 SLM |
Flow rate control range | 5 to 100% F.S. |
Accuracy | ± 2% F.S. |
SEC-400MK3
Materials at gas contact area | SUS316, Viton® |
---|---|
Valve type | Open at power-off: O |
Standard flow rate range (N2 equivalent F.S.) | 10/20/30/50/100 200/300/500 SCCM 1/2/3/5 SLM |
Flow rate control range | 5 to 100% F.S. |
Accuracy | ± 2% F.S. |
SEC-500MK2
Materials at gas contact area | SUS316, Viton® |
---|---|
Valve type | Open at power-off: O |
Standard flow rate range (N2 equivalent F.S.) | 10/20 SLM
|
Flow rate control range | 5 to 100% F.S. |
Accuracy | ± 2% F.S. |
SEC-500MK3
Materials at gas contact area | SUS316, Viton® |
---|---|
Valve type | Open at power-off: O |
Standard flow rate range (N2 equivalent F.S.) | 10/20 SLM
|
Flow rate control range | 5 to 100% F.S. |
Accuracy | ± 2% F.S. |
※The SEC-400MK3 and SEC-500MK3 are compatible with the following gases:Air, N2, O2, Ar, H2, He