Industry

UVISEL NIR

概要

It uses a very high spectral resolution monochromator automatically controlled (choice of gratings, slits and detectors) for continuous measurements over the whole range. The VIS range is covered by a photomultiplier detector while the NIR range uses an InGaAs photodiode.

The spectral range of a spectroscopic ellipsometer is very important as it determines the possible applications. The NIR range provides two main advantages:

  • Longer wavelengths ensure a transparent region for thickness measurements of all the materials absorbing in the visible range.
  • The accuracy for the characterization of thick films is enhanced.

The UVISEL NIR is mainly dedicated to semiconductor, optical coatings, optoelectronic and telecommunication applications.

制造: HORIBA Scientific

規格

Characterization of thickness and optical constants in the NIR-VIS spectral range of thin films and multilayer stacks for:

  • Dielectrics

  • Semiconductors

  • Conductive oxides

  • Compound alloys

  • Thin metal films

  • Glass

Determination of compound alloy composition

Characterization of silicon crystallinity

NIR applications at special common wavelengths (1550, 1300,. nm)

Measurement of thick films up to 40 µm

Material properties: graded, anisotropic,