Industry
Exhaust Pressure Controller EC-5000 Series
Overview
The EC-5000 series exhaust pressure controller can maintain a consistent pressure (at a pressure set by the user) in the chamber. The high-resolution stepper motor and unique butterfly valve ensure a fast, high-resolution response.
Features
- Suitable for high vacuum: Stainless steel body.
- Corrosion resistant: Models with PTFE bodies are also available.
- RoHS compliant
When the exhaust flow rate is adjusted to optimal levels:
- The resist is distributed in an even film.
- Secondary deposition of the mist is prevented.
- The diffusion of dangerous vapor is prevented.
Furthermore, there is less change in sensitivity caused by the accumulation of resist and other contamination compared with flow rate sensor control, and the influence of turbulence and other noise is eliminated which enables superior, stable, responsive control.
Manufactured by HORIBA STEC
Specifications
Model EC- | 5104 | 5105 | 5202 | |||||||||||||||
Compatible size | NW40 | NW50 | 25 mm PTFE fitting | 1 inch PTFE fitting | ||||||||||||||
Materials at gas contact area | SUS316L, Fluoro rubber | PTFE, PEEK, Fluoro rubber | ||||||||||||||||
Conductance | 0.4 to 80L/s | 0.6 to 200L/s | —— | |||||||||||||||
Outflow at 100 mm H2O | 20L/min | 25L/min | 3L/min | |||||||||||||||
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Applications
- Diffusion/heat oxidation processing.
- For vertical furnaces, especially phosphor diffusion.
- Ideal for pyrogen oxidation.
- Spin coater/developer processing.