Industry
DIGISCREEN
概要
The Smallest Footprint Film Metrology Platform
The DIGISCREEN is an automated Spectroscopic Reflectometer platform ideally suited for R&D and pilot production of flat panel displays.
Its unique compact design provides a sample holder almost vertical allowing easier integration and a smaller footprint and is able to handle up to 7th generation substrates.
The DIGISCREEN spectroscopic reflectometer allows extremely fast and accurate measurements of film thickness and uniformity over large area flat panel displays.
The easy-to-use, robust Windows® based software integrates push button recipe for automatic film homogeneity maps and reprocessing capability.
特長
- Automated UV-VIS spectroscopic reflectometer platform ideally suited for R&D and pilot production of flat panel displays
- Up to 7th generation flat panel display substrates
- Unique vertical design
- Fast film thickness uniformity mapping
- Simple automatic operations
製造会社: HORIBA
仕様
Characterization of film thickness and uniformity for:
- Oxides
- Nitrides
- Silicon