불산농도계 HF-960H(고농도 용)

HF / HCl Concentration Monitor HF-960H

고농도의 불산,염산 등의 측정에 사용됩니다. HF-960H는 반도체 제조공정등에서 사용되는 불산,염산 농도를 고정밀하게 측정합니다. 측정 원리는 4극식 전도도 측정-농도 환산 방식을 사용하고 저농도부터 고농도까지 폭넓은 측정범위를 측정합니다. 전용 센서 FES-510Series는 내약품성이 높은 재질을 사용하기 때문에 고농도의 불산,염산 관리에 적합합니다. 내약품성에 우수한 4극식 카본센서 사용

Segment: Semiconductor
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.
  • 폭넓은 측정 범위 : 소수점 자동변경에 의해 HF농도 0.000~10.00%까지 측정가능.
  • 픅정범위 자동 변환 : 고농도부터 저농도까지 측정범위를 자동으로 변경.
  • HF농도,HCL농도,전도도,온도까지 4가지 성분 측정 : HF농도,HCL농도는 각각의 온도 특성에 따라 온도보상 측정합니다.
  • 내약품성에 강한 4극식 카본센서 사용 : 내약품성이 강한 유리 카본을 사용한 신형 4극식 유통형 센서 FES-510Series사용.
  • 4채널 출력 : 4채널 출력이 가능하며 HF농도,HCL농도,전도도,온도 성분에 대한 각각의 출력이 가능, 전류출력은 DC4~20mA, DC0~20mA 중 선택 가능.
  • DC24V전원
ModelHF-960H
Measurement method4-electrode carbon flow-type conductivity measurement – concentration conversion
Sensor input1-channel
Temperature sensor specificationsPlatinum resistance 1000Ω/0ºC
Measuring rangeHF concentration: 0 to 10%
HCI concentration: 0 to 10%
Conductivity: 0 to 1000 mS/cm (without temperature compensation)
Temperature: 0 to 100ºC (The number of decimals displayed can be selected from 1 and 2.)
RepeatabilityWithin ±0.5% of the full scale (in equivalent input)
LinearityWithin ±0.5% of the full scale (in equivalent input)
Transmission outputNo. of outputs: 4
4 to 20 mA DC or 0 to 20 mA DC: I/O insulation type
Maximum load resistance: 900Ω
Transmission output range: Custom setting possible within measurement range
(Negative terminals of each transmission output channels are connected internally thus
have the same electric potential.)
Contact outputNo. of outputs: 5
Alarm contact outputs: R1, R2, R3 and R4
Contact type: Relay contact, SPST
Contact rating: 240 V AC, 1A and 30 V DC, 1A (resistance load)
Contact function: Selectable between upper/lower limit operation (ON/OFF control),
and delay operation
Contact action: • Closed during control action (during error setting)
• Opened during normal status (including power supply off) 
Error alarm output (RF)
Contact type: Relay contact, SPDT
Contact rating: 240 V AC, 1A and 30 V DC, 1A (resistance load)
Contact function: Selectable from error, trouble warning and maintenance
Contact action: When connected between C and NO, the contact is closed when status
is normal and opened when error is detected (including power supply off)
(Contact status is reversed for connection between C and NC.)
(R1, R2, R3 and R4, RF are for common use, respectively.)
Contact inputNo. of inputs: 1
Contact status: Open collector no-voltage contact a
Contact function: Transmission output hold
Communications outputRS-485 input/output
Calibration functionConductivity: Based on the specified compensation coefficient for the cell constant (parameter input)
Temperature: Calibrated by comparing with the reference thermometer
Transmission output Hold functionSelectable from the previous value hold and optional value hold (However, only the previous value hold is available during the maintenance mode.
Self-diagnosis function
  • Sensor diagnosis (Short-circuit and disconnection of the temperature sensor)
  • Converter error
Temperature compensation
  • HF and HCI specific temperature compensation
  • Input of optional temperature compensation coefficient
     (Reference temperature: 25ºC, Temperature coefficient: 0 to 3%/ºC)
Temperature compensation rangeHF: 0 to 80ºC, HCI: 0 to 80ºC, Conductivity: 0 to 100ºC
Ambient environmentTemperature: -5 to 45ºC, Relative humidity: 20 to 85% (without condensation)
Power supply24 V DC ±10%, 10 W (max.)
Protective structurePanel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type)
MassApprox. 550g
Conforming standardsCE marking, FCC Part 15
Compatible sensorsFES-510 series (flow-type carbon sensor)

4-electrode carbon flow-type conductivity sensor

ModelFES-510-1/4FES-510-3/8FES-510-1/2FES-510-3/4FES-510-1
Liquid end materialGlass carbon (electrode), PFA (body), Kalrez® (seal)
Piping size1/4 inch3/8 inch1/2 inch3/4 inch1 inch
Sample flow rate0 to 2 L/min0 to 8 L/min0 to 10 L/min0 to 15 L/min0 to 25 L/min
Sample pressure range0 to 0.5 MP for 5 to 50ºC, 0 to 0.1 MP for above 100ºC
For 50 to 100ºC, pressure range is plotted between 0.5 MPa and 0.1 MP as shown on the line graph (refer to diagram on the right)
Sample temperature5 to 100ºC (Aqueous solution which boils at 100ºC)
Cable length10 m (standard)

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