HE-960LF / FS-09F-1/2

HE-960LF / FS-09F-1/2

평탄 카본 센서 전도도계

HE-960LF는 Slurry 농도 조절에 적합합니다. Slurry의 희석을 일정하게 유지하는 것이 효과적입니다. 적절한 전도도 값을 유지하는 것은 웨이퍼 연마 공정의 공정 안정성에 기여합니다. CMP Slurry와 같은 점성이 높은 시료액도 전극에 부착되는 시료액의 위험을 감소시키는 센서 구조를 사용하기 때문에 문제없이 측정할 수 있습니다. 또한, 이 센서는 내화학성이 우수한 습식 소재로 제작되어 반도체 공정의 청결도 요구 사항을 충족합니다. 상기 이외에도, 반도체 공정 개발 단계에서의 도입 및 특수 화학물질의 전도도 제어에도 사용할 수 있습니다.

Segment: Semiconductor
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

High accuracy / High stability

  • Measurement range : 0 to 2,000 μS/cm , 0 to 10,000 μS/cm
  • Repeatability : ± 0.5% F/S , ± 1.0% F/S

Metal contamination free

Since special carbon is used for the electrode material, there is no need to worry about metal contamination elution.

Equipped with concentration conversion function

Two types of concentration conversion are possible by inputting the relationship between the chemical concentration and conductivity and the temperature characteristics.
It is especially suitable for dilution control of low-concentration chemicals.

Space saving

The degree of freedom in installation layout is improved by downsizing from our conventional conductivity sensor.

 

Example of installation

■Specification conveter

Product nameConductivity meter
ModelHE-960LF
Measurement methodElectrode type(2-electrode method)
Temperature
specifications sensor
Platinum resistance 1000Ω/℃
Measurement
range
Cell constant0.1/cm1.0/cm
Conductivity0.00 to 20.00μS/cm0.0 to 200.0μS/cm
0.0 to 200.0μS/cm0 to 2000μS/cm
0 to 1000μS/cm0 to 10000μS/cm
*Measuring range of raw conductivity Switched with setting change
Temperature0 to 100℃ Actual temperature measuring range depend on the performance of the sensor connected.
Concentration
conversion
Option 1,20 to 10.000% Conversion formula is defined by user
(temperature compensation and concentration conversion)
RepeatabilityCell constant0.1/cm1.0/cm 
Conductivity0.00 to 20.00μS/cm range0.0 to 200.0μS/cm rangeWithin ±0.5% full scale
0.0 to 200.0μS/cm range0 to 2000μS/cm range
0 to 1000μS/cm range0 to 10000μS/cm rangeWithin ±1.0% full scale
Temperature±0.5℃
ConditionEquivalent input
LinearityCell constant0.1/cm1.0/cm 
Conductivity0.00 to 20.00μS/cm range0.0 to 200.0μS/cm rangeWithin ±0.5% full scale
0.0 to 200.0μS/cm range0 to 2000μS/cm range
0 to 1000μS/cm range0 to 10000μS/cm rangeWithin ±1.0% full scale
Temperature±0.5℃
ConditionEquivalent input
Transmission outputNumber of output:4
DC4 to 20mA / 0 to 20mA input/output isolated type
Maximum load resistance : 900Ω
Transmission output range : Free setting within measuring range
(Negative terminals of each transmission output channel are connected inside and thus
have the same electrical potential.)
Contact outputNumber of relay:5
ALARM contact R1,R2,R3 and R4
Contact type relay : Relay contact, SPST (1a)
Contact rating:240 V AC,1 A or 30 V DC, 1 A(resistance load)
Contact function Upper or lower ON/OFF alarm each measurement items.
Contact action Closed when status is in the event.
Opened when any erroneous status is normal or power is down.
R1,R2 and R3 share a common terminal.
Self diagnosis contact RF
Contact type : relay contact , SPDT (1c)
Contact rating:240 V AC,1 A or 30 V DC, 1 A(resistance load)
C-NO contact action : Closed when status is normal. Opened when any erroneous status is
detected or power is down. R4 and RF share a common terminal.
Contact inputNumber of input:1
Contact type:open collector. No-voltage contact
Function : Hold command
Communication outputRS-485 communication
Self-checkSensor diagnosis (Short-circuit and disconnection of the temperature sensor).
Converter error
Temperature
compensation
of conductivity
● Arbitrary temperature coefficient entry
(reference temperature : 25℃, temperature coefficient : 0%/℃ to 5%/℃)
● Arbitrary temperature compensation formula entry
(reference temperature : 25℃, formula is defined by user)
● No temperature compensation is performed.
Temperature
compensation range
0 to 100℃
The temperature compensation under 0℃ and over 100℃ is expanded by a function
Ambient temperature5 to 45℃
Relative humidity-25 to 65℃
Power supplyRated voltage 24 V DC, 10W (max.)
StructureIndoor-use panel installation type
Panel case : ABS, terminal : PBT
Panel : IP65 dust and water proof structure
Conforming standardsCE MarkingEMC Directive : EN61326-2-3
FCC RuleFCC Part15
MassApprox. 550g
External dimensions96 (W) × 96 (H) × 115 (D) mm
Case depth : approx. 105mm (when panel-mounted)
Compatible sensorsFS-09F-1/2

 

■Specification sensor

ModelFS-09F-1/2FS-09F-1/2-200
Wetted materialGlass carbon, PFA. Kalrez® 6375
pipe size1/2 inch
Flow rate0L/min to 10
Keep enough flow rate to measure latest sample.
Sample pressure0 to 0.3MPa (Temperature : 20 to 30 degree℃)
Sample temperature20~30 degree℃
If the difference between the ambient temperature
and the sample liquid temperature is 5 degree℃,
a measurement error of about 1 degree℃ will occur.
Cable lengthApprox. 3.5m

 

Dimensions (mm)


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