D700MG

高速精密壓力式質量流量模組

關鍵的半導體製造流程不斷需要精密的氣體流量控制設備,以實現產品的創新以及前緣記憶體和邏輯元件從實驗室到工廠的量產。 HORIBA 發表的新型 MFC D700MG,它是 D500MG 的向上相容型號,以支援客戶的挑戰。

事業部: Semiconductor
產品分類: Fluid Control
製造商: HORIBA STEC, Co., Ltd.

請選擇一個本產品可販售的國家或區域:
China,Germany,Ireland,Israel,Italy,Japan,Korea (South),Malaysia,Singapore,Taiwan,United Kingdom,United States
瀏覽完整列表 點擊此處.

  • On-Tool Gas and Full Scale Configuration Change *Only EtherCAT 

    • Provide flexibility to process optimization  

  • 100ms Step-up Response & MFC-to-MFC deviation control 

    • Deliver high productivity and greater process performance 

  • MRMG functionality for small flow rate(Bin101 – Bin105) 

    • Provide flexibility to process requiring small flow rate 

  • Better Valve Shut-off and Corrosion Resistance by PFA nozzle 

    • Robustness with less particle risk reduce down time and optimize yield  

  • State Monitor Function 

    • Provide more internal data for smarter failure prediction  

Output items of state monitor function

Flow/Pressure zero adjustment counts 

Valve drive counts 

Record of max/min P0,P1,P2 pressure 

Record of max/min Block temperature 

Total time over/below pressure spec. 

Total time over/below temperature spec. 

Total working time 

Total control time 

Total flow time (per calibration instance) 

Total flow rate (per calibration instance) 

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* 這些欄位為必填項目。

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