SEMICON Japan 2012


Event dates: 5 December 2012 - 7 December 2012

Location: Japan(Chiba)

 

 


HORIBA celebrates its 60th anniversary in 2013.

With leading-edge semiconductor processes and next generation technologies,
including OLEDs, and secondary batteries,
HORIBA caters to your needs with our world-class analysis, monitoring,
and control technologies, worldwide service network, and sixty-year history of achievement.
HORIBA will continue to grow into the future as your trusted technology partner.

 

HORIBA Booth : Booth No. Hall 3,3A-213

  

Makuhari Messe

Official Web Site:http://www.m-messe.co.jp/en/index.html


Deposition & Etching(For Process) 

■Gas Control

     

■Gas Monitoring 

  • Vapor Concentration Monitor IR-300M Series

 

■Pressure Control


■Liquid Control & Vaporization

  • Digital Liquid Mass Flow Meter/Controller LF-F/LV-F Series
  • Mixied Injection MI-1000, MV-1000, 2000
  • Direct Injection VC-1000
  • Compact Baking System LSC Series

■Vacuum Measurement

 

  Wet Cleaning               

■Chemical Solution Monitoring

  • Chemical Solution Concentration Monitor CS-600F Series

    Fiber Type
    Chemical Solution Concentration Monitor CS-100F1 Series
    Fiber Type Multi-point 
    Chemical Solution Concentration Monitor CS-100F4 Series
    Chemical Solution Concentration Monitor CS-100 Series

  • Citric Acid Concentration Monitor HE-960-CA
  • Phosphoric Acid Concentration Monitor HE-960H-PA
  • Low Concentration TMAH Monitor HE-960H-TM-S
  • Dissolved Ozone/Hydrogen Peroxide Concentration Monitor HZ-960/HZ-960-HPO

  • KOH/NaOH Concentration Monitor HE-960H-KN
  • HF Concentration Monitor CM-510
  • Dissolved Oxygen in Hydrofluoric Acid Monitor HD-960L
  • Compact Water Quality Meter LAQUAtwin Series
  • Benchtop pH・Water Quality Analyzer LAQUA F-70 Series

Lithography

Particle Detection

For R & D

■Thin Film Measurement

■Material Analysis

  • Photoluminescence Measurement System PHOTOLUMINOR
  • Cathode Luminescence Measuring Equipmet MP Series
  • Glow Discharge Optical Emission Spectroscopy GD-Profiler 2

 

OEM  

  • OEM Diffraction Gratings
  • OEM Spectrometer

 

 

 


■Exhibitors' Seminars

◆HORIBA liquid monitoring - A wide variety of technologies for
wet processes control

Date: Thursday, December 6 Time: 11:30 - 12:20
Location: Room No. 1 Hall 4

HORIBA's measurement technologies and tools will be widely introduced. Focus is on liquid monitoring in electronics industry. Process chemicals, ultrapure water, functional water and slurry are in the scope. Monitoring of chemical reclaim process is also included. Feedbacks are highly appreciated.

◆Introduction to the application of Residual Gas Analyzer for
the processes of OLEDs, functional thin films, and DLC coating.

Date: Thursday, December 6 Time: 14:30 - 15:20
Location: Room No. 1 Hall 4

We introduce the applications of HORIBA STEC's Residual Gas Analyzer which is the world's smallest and lightest for the processes for OLEDs, functional films, and DLC coating.


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