SEMICON Japan 2012

Event dates: 5 December 2012 - 7 December 2012

Location: Japan(Chiba)

HORIBA celebrates its 60th anniversary in 2013.

With leading-edge semiconductor processes and next generation technologies,
including OLEDs, and secondary batteries,
HORIBA caters to your needs with our world-class analysis, monitoring,
and control technologies, worldwide service network, and sixty-year history of achievement.
HORIBA will continue to grow into the future as your trusted technology partner.

HORIBA Booth : Booth No. Hall 3,3A-213

■Makuhari Messe

Official Web Site:http://www.m-messe.co.jp/en/index.html

Deposition & Etching(For Process) 

■Gas Control

• Pressure Insensitive Mass Flow Controller SEC-Z700X Series
• Mass Flow Module CRITERION D200
• Digital Mass Flow Controller SEC-Z500X Series
• Digital Mass Flow Controller SEC-N100 Series
• High Temperature Digital Mass Flow Controller SEC-8000F/D Series

■Gas Monitoring 

• Vapor Concentration Monitor IR-300M Series

■Pressure Control

• Digital Auto Pressure Regulator UR-Z700 Series

■Liquid Control & Vaporization

• Digital Liquid Mass Flow Meter/Controller LF-F/LV-F Series
• Mixied Injection MI-1000, MV-1000, 2000
• Direct Injection VC-1000
• Compact Baking System LSC Series

■Vacuum Measurement

• Residual Gas Analyzer MICROPOLE System

  Wet Cleaning               

■Chemical Solution Monitoring

• Chemical Solution Concentration Monitor CS-600F Series
  
  Fiber Type
  Chemical Solution Concentration Monitor CS-100F1 Series
  Fiber Type Multi-point 
  Chemical Solution Concentration Monitor CS-100F4 Series
  Chemical Solution Concentration Monitor CS-100 Series

• Citric Acid Concentration Monitor HE-960-CA
• Phosphoric Acid Concentration Monitor HE-960H-PA
• Low Concentration TMAH Monitor HE-960H-TM-S
• Dissolved Ozone/Hydrogen Peroxide Concentration Monitor HZ-960/HZ-960-HPO

• KOH/NaOH Concentration Monitor HE-960H-KN
• HF Concentration Monitor CM-510
• Dissolved Oxygen in Hydrofluoric Acid Monitor HD-960L
• Compact Water Quality Meter LAQUAtwin Series
• Benchtop pH・Water Quality Analyzer LAQUA F-70 Series

Lithography

■Particle Detection

• Reticle/Mask Particle Detection System
  PR-PD2
  PR-PD3
  PR-PD5

• Reticle/Mask Particle Remover RP-1

For R & D

■Thin Film Measurement

• Spectroscopic Ellipsometer Auto SE

■Material Analysis

• Photoluminescence Measurement System PHOTOLUMINOR
• Cathode Luminescence Measuring Equipmet MP Series
• Glow Discharge Optical Emission Spectroscopy GD-Profiler 2

OEM  

• OEM Diffraction Gratings
• OEM Spectrometer

■Exhibitors' Seminars

◆HORIBA liquid monitoring - A wide variety of technologies for
wet processes control

Date: Thursday, December 6 Time: 11:30 - 12:20
Location: Room No. 1 Hall 4

HORIBA's measurement technologies and tools will be widely introduced. Focus is on liquid monitoring in electronics industry. Process chemicals, ultrapure water, functional water and slurry are in the scope. Monitoring of chemical reclaim process is also included. Feedbacks are highly appreciated.

◆Introduction to the application of Residual Gas Analyzer for
the processes of OLEDs, functional thin films, and DLC coating.

Date: Thursday, December 6 Time: 14:30 - 15:20
Location: Room No. 1 Hall 4

We introduce the applications of HORIBA STEC's Residual Gas Analyzer which is the world's smallest and lightest for the processes for OLEDs, functional films, and DLC coating.