Vacuum Monochromators and systems

HORIBA Scientific is providing a wide offer of vacuum monochromators, spectrographs and accessories to work in a large spectral range from few nanometers to few hundreds. Based on toroïdal, spherical or plane diffraction gratings, our monochromators provide an unequal throughput and relative high spectral resolution for soft X-ray, EUV, FUV and DUV applications. They are specially recommended for applications such as EUV reflectometry, X-ray Photoemission Spectroscopy (XPS), EUV fluorescence, EUV lithography, Plasma diagnostic or High Harmonic Generation.