CS-900

CS-900

Non-Contact Chemical Concentration Monitor

A chemical concentration monitor designed to measure chemicals used in semiconductor manufacturing processes such as cleaning and etching in a non-contact manner.

Enabling safe and stable concentration monitoring without the risk of chemical leaks or contamination by measuring flowing chemicals inside the pipes without direct contact.

Chemical Concentration

DC24VTransmission OutputContact OutputRS-485High TemperatureNon-contact Multi Component

Segment: Semiconductor
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Non-contact measurement structure

By preventing chemical leaks and contamination, safe and stable measurements become possible.  Furthermore, installation can be performed without cutting the piping, reducing installation time and minimizing the workload during implementation.

Stable measurement of high-temperature chemicals

With a revamped optical system and improved computational processing, high-temperature chemicals (20 to 80°C) essential for cutting-edge chemical processing can be reliably measured with stability.

Prolonged lifespan of light sources

Prolonged lifespan through the adoption of LED lamps (with a 5-year warranty) has been achieved.

Space-saving

Light sources and spectrometers are integrated into the cell unit, contributing to a space-saving design. The display unit is a panel-mount type.

Model nameNon-contact type chemical concentration monitor
ModelCS-900
Measurement methodAbsorption spectroscopy
Concentration calculationTemperature compensated multivariate analysis
Measurement range/
Repeatability (mass%)

Model name

ComponentMeasurable rangeRepeatabilityAnalog output range
CS-900-1P-1P25P5NH30.00%-1.20%±0.05%0.00-10.00
H2O20.00%-5.50%±0.10%0.00-10.00
H2O93.3%-100.0%±1.0%

-

CS-900-1P-P8P8

NH30.20%-0.80%±0.03%0.00-1.00
H2O20.20%-0.80%±0.03%0.00-1.00
H2O98.4%-99.6%±0.3%

-

Conditions of measurement

1) Measurement Frequency: every 3 seconds
2) Moving average : 16 times

Tube

PFA tube 1inch or 3/4inch (Do NOT use anti-static type PFA tube)

Sample condition*1

Sample temperture : 20 to 80°C
Sample temperture, Atmospheric temperture fluctuation :
±1 degree C (period of time: 1 hour)
Sample pressure : Less than 0.2 MPa (G)
Sample pressure fluctuation : Within 0.02 MPa

Power source

DC 24V

Power consumption

Apporox. 30W (Transient electric current at the time of start is excluded)
WeightDisplay unit : Apporox. 0.9kg
Sensor unit: Apporox. 2.9kg
Dimension (WxDxH)Display unit : 96x135x96mm
Sensor unit: 238x135x190mm
Slanting angleSensor unit:
Vertical direction within ±3 degree
Lateral direction 0 to 90 degree
Light source5years
communicationParallel I/O, RS-232C, Analog output

 

Request for Information

Do you have any questions or requests? Use this form to contact our specialists.

* These fields are mandatory.

Related products

CS-100 Series
CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-100F1 Series
CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

CS-600F
CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-620F
CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-700
CS-700

High Precision, High Stability Chemical Concentration Monitor

EG-100
EG-100

Washwater Monitoring System

H-1 Series
H-1 Series

Field-installation type water quality measuring instruments

HC-200F
HC-200F

Field-installation Type Fluoride Ion Concentration Meter

HC-200NH
HC-200NH

Field-installation type ammonia nitrogen meter

HC-300F
HC-300F

Field-installation Type Fluoride Ion Concentration Meter

HD-200
HD-200

Field-installation type dissolved oxygen meter (DO meter)

HD-200FL
HD-200FL

Field-installation type optical dissolved oxygen meter (DO meter)

HD-300
HD-300

Field-installation type dissolved oxygen meter (DO meter)

HD-480
HD-480

Panel-mount type dissolved oxygen meter (DO meter)

HD-960L
HD-960L

HF (Hydrofluoric Acid)  DO (Dissolved Oxygen) Monitor / Pure Water DO (Dissolved Oxygen) Monitor

HD-960LR
HD-960LR

Dissolved Oxygen Concentration Monitor Series for Semiconductor Manufacturing

HE-200C
HE-200C

Field-installation type electric conductivity meter (conductivity meter)

HE-200H
HE-200H

Field-installation type electric conductivity meter

HE-200R
HE-200R

Field-installation type electric resistivity meter (resistivity meter)

HE-300C
HE-300C

Field-installation type electrical conductivity meter (conductivity meter)

HE-300R
HE-300R

Field-installation type electric resistivity meter (resistivity meter)

HE-480C
HE-480C

Panel-mount type conductivity meter (conductivity meter)

HE-480C-GC
HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

HE-480H
HE-480H

Panel-mount type conductivity meter (conductivity meter)

HE-480R
HE-480R

Panel-mount type resistivity meter (resistivity meter)

HE-480R(W)
HE-480R(W)

Resistivity Meter for Semiconductor Cleaning Processes

HE-960CA
HE-960CA

Citric Acid Monitor

HE-960CW
HE-960CW

Panel-mount type 2-channel conductivity meter (conductivity meter)

HE-960H-KOH
HE-960H-KOH

KOH Monitor

HE-960H-TM
HE-960H-TM

Wide range TMAH Concentration Monitor

HE-960H-TM-S
HE-960H-TM-S

High Precision TMAH Concentration Monitor

HE-960HC
HE-960HC

Carbon Sensor Conductivity Meter (High concentration type)

HE-960HI
HE-960HI

Panel-mount type conductivity meter

HE-960LC
HE-960LC

Carbon Sensor Conductivity Meter

CS-100 Series
CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-100F1 Series
CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

CS-600F
CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-620F
CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-700
CS-700

High Precision, High Stability Chemical Concentration Monitor

EG-100
EG-100

Washwater Monitoring System

H-1 Series
H-1 Series

Field-installation type water quality measuring instruments

HF-960M
HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

HU-200SS
HU-200SS

Field-installation type MLSS meter

HU-200TB-H
HU-200TB-H

Field-installation type turbidity meter

HU-200TB-IM
HU-200TB-IM

Field-installation type turbidity/SS meter

HU-200TB-W
HU-200TB-W

Field-installation type turbidity meter

HZ-960
HZ-960

Dissolved Ozone Monitor

HZ-960HPO-M
HZ-960HPO-M

H2O2 Monitor

OPSA-150
OPSA-150

Organic pollutant monitor

TPNA-500
TPNA-500

Automatic total nitrogen/phosphorus monitor

U-50
U-50

Multi-parameter water quality checker

Corporate