Pressure-based Mass Flowmetry

Structure

Starting from the gas inlet, the device consists of an external particle protection filter, an inlet line pressure sensor, a control valve, a pair of pressure sensors, a flow resistor (flow restrictor), and a digital electric circuit. Not only does the gas channel contain no heat source, it is made entirely from metallic materials and has a polished interior surface as standard, making this an ultra-clean model.

Browse Products

D700uF
D700uF

Micro Flow Pressure Insensitive Mass Flow Module

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Best Performance Pressure Insensitive Mass Flow Module

PTFM-ONE-DT
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